Microfluidics and Nanofluidics Fabrication
High-Precision Lithography for Microfluidic and Nanofluidic Devices
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Description
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Microfluidics and nanofluidics enable the precise manipulation of liquids in channels and structures with dimensions ranging from micrometers down to nanometers. These technologies form the foundation of modern lab-on-a-chip systems and are widely used in life sciences, biotechnology, medical diagnostics, drug discovery, chemical analysis, environmental monitoring, and advanced materials research.
Microfluidic devices integrate functions such as mixing, separation, particle sorting, cell analysis, and chemical reactions onto compact platforms. By reducing reagent consumption and sample volumes while increasing throughput and sensitivity, microfluidics supports faster and more cost-effective analytical workflows. Typical devices contain networks of microchannels, reservoirs, mixers, filters, and reaction chambers that require highly accurate patterning and reliable dimensional control.
Heidelberg Instruments lithography systems provide flexible fabrication solutions for microfluidic device development and production. Direct-write lithography enables rapid prototyping without photomasks, significantly shortening development cycles and simplifying design iterations. Structures can be patterned in a wide range of materials, including SU-8, mr-DWL photoresists, and other polymers commonly used for microfluidic masters, molds, and device fabrication. Applications include microfluidic chips, biosensors, organ-on-chip platforms, microreactors, and point-of-care diagnostic devices.
As feature sizes approach the nanoscale, nanofluidics enables the manipulation of individual molecules, nanoparticles, proteins, viruses, and DNA within nanometer-sized channels and pores. Nanofluidic systems are increasingly important for next-generation biosensing, molecular analysis, DNA sequencing, single-molecule research, and advanced biotechnology applications. Fabrication of these structures requires exceptional resolution, dimensional accuracy, and surface quality.
The NanoFrazor complements conventional lithography approaches by enabling direct nanofabrication with ultrahigh resolution and precise three-dimensional topography control. Its grayscale lithography capabilities support the fabrication of complex nanofluidic architectures, while closed-loop operation with integrated topography sensing ensures accurate pattern placement and reproducible results. This combination makes it particularly well suited for advanced nanofluidic research and the development of next-generation fluidic devices.
From rapid prototyping of microfluidic chips to the fabrication of sophisticated nanofluidic systems, Heidelberg Instruments lithography solutions support researchers and engineers in developing innovative devices for diagnostics, biotechnology, photonics, materials science, and fundamental research.
Typical Applications
- Lab-on-a-chip devices
- Organ-on-chip systems
- Point-of-care diagnostics
- Biosensors
- DNA sequencing and analysis
- Single-cell analysis
- Nanoparticle manipulation
- Microreactors
- Environmental monitoring
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Requirements
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Smooth surface
High aspect ratio structures
Ultra-high-resolution holes and channels
Accurate grayscale lithography for channels (particles guiding)
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Solutions
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High resolution (DWL & MLA series) and ultra-high resolution (NanoFrazor)
Pattern small-diameter holes and narrow channelsGrayscale lithography (DWL series, µMLA & NanoFrazor)
Used to pattern either simple or complex 2.5D topographies (e.g., tapered channels)High aspect ratio
Tall channels with vertical side walls (MLA series)No undercut
The structure can be used for replicationNanoscale thermal conversion (NanoFrazor)
E.g., local binding of amine groups
Microfluidics and nanofluidics enable the precise manipulation of liquids in channels and structures with dimensions ranging from micrometers down to nanometers. These technologies form the foundation of modern lab-on-a-chip systems and are widely used in life sciences, biotechnology, medical diagnostics, drug discovery, chemical analysis, environmental monitoring, and advanced materials research.
Microfluidic devices integrate functions such as mixing, separation, particle sorting, cell analysis, and chemical reactions onto compact platforms. By reducing reagent consumption and sample volumes while increasing throughput and sensitivity, microfluidics supports faster and more cost-effective analytical workflows. Typical devices contain networks of microchannels, reservoirs, mixers, filters, and reaction chambers that require highly accurate patterning and reliable dimensional control.
Heidelberg Instruments lithography systems provide flexible fabrication solutions for microfluidic device development and production. Direct-write lithography enables rapid prototyping without photomasks, significantly shortening development cycles and simplifying design iterations. Structures can be patterned in a wide range of materials, including SU-8, mr-DWL photoresists, and other polymers commonly used for microfluidic masters, molds, and device fabrication. Applications include microfluidic chips, biosensors, organ-on-chip platforms, microreactors, and point-of-care diagnostic devices.
As feature sizes approach the nanoscale, nanofluidics enables the manipulation of individual molecules, nanoparticles, proteins, viruses, and DNA within nanometer-sized channels and pores. Nanofluidic systems are increasingly important for next-generation biosensing, molecular analysis, DNA sequencing, single-molecule research, and advanced biotechnology applications. Fabrication of these structures requires exceptional resolution, dimensional accuracy, and surface quality.
The NanoFrazor complements conventional lithography approaches by enabling direct nanofabrication with ultrahigh resolution and precise three-dimensional topography control. Its grayscale lithography capabilities support the fabrication of complex nanofluidic architectures, while closed-loop operation with integrated topography sensing ensures accurate pattern placement and reproducible results. This combination makes it particularly well suited for advanced nanofluidic research and the development of next-generation fluidic devices.
From rapid prototyping of microfluidic chips to the fabrication of sophisticated nanofluidic systems, Heidelberg Instruments lithography solutions support researchers and engineers in developing innovative devices for diagnostics, biotechnology, photonics, materials science, and fundamental research.
Typical Applications
- Lab-on-a-chip devices
- Organ-on-chip systems
- Point-of-care diagnostics
- Biosensors
- DNA sequencing and analysis
- Single-cell analysis
- Nanoparticle manipulation
- Microreactors
- Environmental monitoring
Smooth surface
High aspect ratio structures
Ultra-high-resolution holes and channels
Accurate grayscale lithography for channels (particles guiding)
High resolution (DWL & MLA series) and ultra-high resolution (NanoFrazor)
Grayscale lithography (DWL series, µMLA & NanoFrazor)
High aspect ratio
No undercut
Nanoscale thermal conversion (NanoFrazor)
Application images












Suitable Systems
MLA 150 Maskless Aligner
- Maskless Aligner
The fastest maskless tool for rapid prototyping, the alternative to the mask aligners. Perfect for standard binary lithography.
DWL 66+ Laser Lithography System
- Direct Write Laser Lithography System
Our most versatile system for R&D and rapid prototyping with resolution down to 200 nm and professional grayscale capabilities.
DWL 2000 GS / DWL 4000 GS Laser Lithography Systems
- Direct Write Laser Lithography System
The most advanced industrial grayscale lithography tool on the market.
NanoFrazor Nanolithography Tool
- Thermal Scanning Probe Lithography System
Versatile & modular tool combining Thermal Scanning Probe Lithography, Direct Laser Sublimation, and advanced automation for cutting-edge R&D.
