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APPLICATIONS

1D & 2D Materials
Advanced Packaging
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Displays
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MEMS
Microelectronics and Nanoelectronics
Microfluidics and Nanofluidics
Micro-optics and Photonics
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Sensors

1D & 2D Materials
Advanced Packaging
Biotechnology and Medical Engineering
Displays
High-Security Printing
Materials Science
MEMS
Microelectronics and Nanoelectronics
Microfluidics and Nanofluidics
Micro-optics and Photonics
Nanoimprint Templates
Photomasks
Quantum Devices
Semiconductors
Sensors

CORE TECHNOLOGIES

Maskless Laser Lithography
Thermal Scanning Probe Lithography

Maskless Laser Lithography
Thermal Scanning Probe Lithography

KEY FEATURES

Accurate Pattern Placement
Grayscale Lithography
High Aspect Ratio
High & Ultra-High Resolution
In-situ Inspection & Metrology
Non-invasive Nanolithography
Small & Unconventional Substrates

Accurate Pattern Placement
Grayscale Lithography
High Aspect Ratio
High & Ultra-High Resolution
In-situ Inspection & Metrology
Non-invasive Nanolithography
Small & Unconventional Substrates

PRODUCTS

μMLA
MLA 150
DWL 66⁺
NanoFrazor
MLA 300
DWL 2000 GS / DWL 4000 GS
VPG⁺200 / VPG⁺400 / VPG⁺800
VPG⁺ 1400 FPD
VPG 300 DI
ULTRA
Contact Sales

μMLA
MLA 150
DWL 66⁺
NanoFrazor
MLA 300
DWL 2000 GS / DWL 4000 GS
VPG⁺200 / VPG⁺400 / VPG⁺800
VPG⁺ 1400 FPD
VPG 300 DI
ULTRA
Contact Sales

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Press Releases
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Events
Application Image Competition on Advanced Micro- & Nanofabrication

Press Releases
Blog
Events
Application Image Competition on Advanced Micro- & Nanofabrication

COMPANY

About Us
The Lithographer
40 Years of Heidelberg Instruments
Careers
Press Releases
Network memberships
Locations
Contact Sales

About Us
The Lithographer
40 Years of Heidelberg Instruments
Careers
Press Releases
Network memberships
Locations
Contact Sales

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Disclaimer: Translations were created with the help of AI. Heidelberg Instruments does not guarantee the completeness and correctness of the translations.

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