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We invite you to explore our comprehensive collection of data sheets, research papers, whitepapers, and other documents related to Heidelberg Instruments. Our library is designed to serve as a valuable resource for anyone seeking information about our products, applications, core technologies, or key features. Not only do we publish our own information here, but we also feature joint documents produced with partners and papers by other authors using our systems. Some links may lead to external sources.
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| Title | Description | Category | Tags | Publisher | Published | Link | hf:doc_categories | hf:doc_tags | hf:doc_author | |
|---|---|---|---|---|---|---|---|---|---|---|
| Shape-Conformal Porous Frameworks for Full Coverage of Neural Organoids and High-Resolution Electrophysiology | A self-assembling, shape-matched 3D soft interface enables high-density electrophysiology, stimulation, imaging, and neuromodulation in human neural organoids, enabling high-resolution, network-level activity mapping and disease modeling. | Scientific Paper | Direct Writing, MLA 150 | nature biomedical engineering | February, 2026 | scientific-paper | direct-writing mla-150 | nature-biomedical-engineering | ||
| Transfer, Integration, and Inverse Design of Metasurfaces in Suspended Membranes | This work introduces OPTIMISM, enabling universal transfer and integration of metasurfaces in suspended membranes, highlighting inverse-designed ultrathin meta-optics and refractive-index effects for scalable fiber-tip and biomedical … | Scientific Paper | Direct Writing, µMLA | Moore More | February, 2026 | scientific-paper | direct-writing %c2%b5mla | moore-more | ||
| Engineered Strain in 2D Materials by Direct Growth on Deterministically Patterned Grayscale Topographies | Strain is engineered during 2D growth on grayscale topographies, achieving controlled 0–0.5% uni- and multiaxial tensile strain in MoS2 without transfer, enabling direct integration into nanoelectronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Science | February, 2026 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-science | ||
| Microfluidic-Driven Lipid Nanoparticles for Improved miRNA Delivery via Endo-Lysosomal Trafficking Optimization | This study shows post-processing significantly shapes miRNA-loaded lipid nanoparticles’ size, charge, stability, and intracellular trafficking, establishing strategies to optimize non-viral gene delivery performance. | Scientific Paper | Direct Writing, µMLA | Advanced Science | February, 2026 | scientific-paper | direct-writing %c2%b5mla | advanced-science | ||
| Self-Powered Ultrasensitive Photodetector based on 3C-SiC/Si Heterojunction with Electron-Confined Architecture | This study presents the first island-like 3C-SiC/Si heterojunction self-powered photodetector, achieving high responsivity, detectivity, 65% EQE, and fast response at 637 nm without external bias. | Scientific Paper | Direct Writing, MLA 150 | ChemRxiv | February, 2026 | scientific-paper | direct-writing mla-150 | chemrxiv | ||
| 3D Micropatterning of PEDOT:PSS/Gelatin Conductive Hydrogels via Two-Photon Lithography for Soft Bioelectronics | Soft 3D bioelectronic interfaces were fabricated by blending PEDOT:PSS with methacrylated gelatin via two-photon polymerization, yielding conductive, low-impedance, mechanically compliant hydrogels for improved neuronal interfacing. | Scientific Paper | MLA 150, Two-Photon Polymerization (TPP) | npj flexible electronics | January, 2026 | scientific-paper | mla-150 two-photon-polymerization | npj-flexible-electronics | ||
| Beta Site Installation of NanoFrazor with Parallelization Capabilities at EPFL | Following the successful introduction of the modular NanoFrazor nanolithography system in 2024, Heidelberg Instruments is proud to announce the installation of the newest NanoFrazor at EPFL. | Press | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | January, 2026 | press | nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| Maskless Laser Lithography for Josephson Junction Fabrication | Discover how maskless laser lithography enables efficient, high‑resolution, high‑throughput fabrication of Josephson junctions—without relying on electron beam lithography. | Application Note | Direct Writing, MLA 300 | Heidelberg Instruments | January, 2026 | application-note | direct-writing mla-300 | heidelberg-instruments | ||
| Strained 2D Semiconductor Lateral Heterojunctions via Grayscale Thermal-Scanning Probe Lithography | Locally strained 2D semiconductor lateral heterojunctions are created by maskless grayscale thermal-Scanning Probe Lithography, enabling tunable asymmetric electrical behavior in MoS₂–Au nanoarrays for nanoelectronic and sensing … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Small | January, 2026 | scientific-paper | nanofrazor thermal-scanning-probe | small | ||
| Advancing neural interfaces: a framework for the fabrication and characterization of freestanding micro-nanodevices | A comprehensive framework for fabricating, harvesting, and characterizing freestanding micro-nanodevices, enabling minimally invasive, wireless neural interfaces with subcellular resolution and scalable neuromodulation potential. | Scientific Paper | Direct Writing, MLA 150 | Microsystems & Nanoengineering (nature) | January, 2026 | scientific-paper | direct-writing mla-150 | microsystems-nanoengineering-nature | ||
| Beyond Binary Patterning: Polypropylene Carbonate as a Versatile Thermal Resist for High-Fidelity Grayscale Nanofabrication | Polypropylene carbonate enables high-resolution t-SPL nanopatterning via controlled thermal decomposition, achieving 50 nm lateral, sub-nanometer vertical resolution and grayscale pattern transfer for photonic and nanoelectronic fabrication. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Microsystems & Nanoengineering (nature) | January, 2026 | scientific-paper | nanofrazor thermal-scanning-probe | microsystems-nanoengineering-nature | ||
| A Mechanophenotyping Chip for High-Throughput Detection of Metastatic Bacteria-Infected Circulating Tumor Cells | LesM microfluidic chip captures and mechanophenotypes circulating tumor cells, distinguishing bacteria-infected breast cancer cells via deformation, linking microbial cargo and biomechanics to metastatic risk and antibiotic … | Scientific Paper | Direct Writing, MLA 150 | nature communications | January, 2026 | scientific-paper | direct-writing mla-150 | nature-communications | ||
| Heidelberg Instruments Reports Major Order for VPG+ 1850 FPD Volume Pattern Generator from Leading Asian Display Photomask Manufacturer | Heidelberg Instruments has received a substantial order from a top-tier photomask manufacturer in Asia for a VPG+ 1850 FPD system. | Press | VPG | Heidelberg Instruments | December, 2025 | press | vpg | heidelberg-instruments | ||
| Top-Down Fabrication of Silicon Nanowire Field-Effect Transistors Using Thermal Scanning Probe Lithography | Hybrid t-SPL and photolithography fabricate Si nanowire FETs with precise dimensional control, reproducible liquid-gate characteristics, and low-cost processing for biosensing applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Nano Materials | December, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-nano-materials | ||
| Bubble detachment from patterned solid surfaces: Roles of wettability contrast and domain geometry | Patterned wettability contrasts control bubble detachment, revealing contact-line pinning, geometry-dependent volumes, and deviations from classical models, offering insights to improve hydrogen electrolysis and mineral flotation efficiency. | Scientific Paper | Direct Writing, MLA 150 | ScienceDirect | December, 2025 | scientific-paper | direct-writing mla-150 | sciencedirect | ||
| Two-dimensional gradients in magnetic properties created with direct-write laser annealing | Two-dimensional material-property gradients in magnetic thin films unlock novel behaviors, enabling devices such as spin-wave filters and passive domain-wall reset architectures, expanding functionality for future technologies. | Scientific Paper | Direct Writing, DWL 66+ | nature communications | December, 2025 | scientific-paper | direct-writing dwl-66 | nature-communications | ||
| Scalable and precise diffractive optics via grayscale lithography and soft nanoimprinting | Grayscale lithography with soft nanoimprinting enables low-cost, single-step fabrication of high-quality diffractive optics, expanding design freedom for lenses, holography, and advanced optical systems. | Scientific Paper | Direct Writing, DWL 66+, Grayscale | SPIE. Digital Library | December, 2025 | scientific-paper | direct-writing dwl-66 grayscale | spie-digital-library | ||
| Gradient Electronic Landscapes in van der Waals Heterostructures | Thermal scanning probe lithography patterns nanometer-precise topographies in hBN-encapsulated graphene, enabling periodic electric-field modulation and tailored quantum transport potentials beyond planar device geometries. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nano Letters | December, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | nano-letters | ||
| Variability characteristics of non-stoichiometric, low-cost silicon oxide resistive memory | Eco-friendly silicon-oxide RRAM using biocompatible, low-cost materials shows state-of-the-art variability, supports intermediate resistance states, and suits memory-centric, non-von-Neumann computing architectures via simple microfabrication techniques methods. | Scientific Paper | Direct Writing, µMLA | AIP Advances | December, 2025 | scientific-paper | direct-writing %c2%b5mla | aip-advances | ||
| Direct Laser Writing of Au Top Contacts on WSe2 for High-Speed Photodetection | Laser-written gold contacts enable WSe2 photodetectors with nanosecond response, 250 MHz bandwidth, and strong responsivity, highlighting scalable high-speed optoelectronics using 2D materials for future applications. | Scientific Paper | Direct Writing, µMLA | ACS Applied Nano Materials | November, 2025 | scientific-paper | direct-writing %c2%b5mla | acs-applied-nano-materials | ||
| Defect Engineering in β‐Bi2 SeO5 /Bi2 O2 Se Heterostructures for High‐Resolution Phototransistor Arrays | Defect-engineered β-Bi2SeO5/Bi2O2Se heterojunctions suppress vacancies, enable type-II charge separation, and achieve high-responsivity phototransistors and high-resolution arrays for advanced optoelectronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | November, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| Deformability determines confined cancer cell migration efficiency with limited effect on directionality | Microfluidic studies link cancer cell deformability to improved squeezing through confinements, comparing HT1080 and MV3 cells, while showing minimal influence on migration path selection decisions. | Scientific Paper | Direct Writing, µMLA | AIP Advances | November, 2025 | scientific-paper | direct-writing %c2%b5mla | aip-advances | ||
| Stretchable Porous Membranes for Barrier Tissue Models with Real-Time Measurement and Biomimetic Cyclic Strain | Gold microelectrodes patterned on porous, stretchable PDMS membranes enable impedance sensing under cyclic strain, advancing barrier tissue models and applications in wearables, robotics, and devices. | Scientific Paper | Direct Writing, MLA 150 | MDPI | November, 2025 | scientific-paper | direct-writing mla-150 | mdpi | ||
| Silicon Metalens with Subwavelength Resolution for High-Performance Flat Optics | This application note describes a low-temperature lithographic process for fabricating high-resolution silicon metalenses, overcoming thermal stress issues and enabling scalable production for mid-IR optics. | Application Note | Direct Writing, DWL 66+ | Heidelberg Instruments, Koç University | November, 2025 | application-note | direct-writing dwl-66 | heidelberg-instruments koc-university | ||
| A nonsurgical brain implant enabled through a cell–electronics hybrid for focal neuromodulation | Circulatronics uses immune cell–electronics hybrids for nonsurgical brain neuromodulation, enabling intravenous delivery, autonomous targeting of inflammation, wireless photovoltaic stimulation, and neural control without invasive surgery. | Scientific Paper | Direct Writing, MLA 150 | nature biotechnology | November, 2025 | scientific-paper | direct-writing mla-150 | nature-biotechnology | ||
| Three-dimensional nanoscale control of magnetism in crystalline Yttrium Iron Garnet | Focused UV laser writing enables three-dimensional, non-destructive anisotropy engineering in crystalline YIG, tuning spin-wave band structures, localization, and non-reciprocity for advanced magnonic and magneto-optic devices. | Scientific Paper | NanoFrazor, NanoFrazor Explore, Thermal Scanning Probe (t-SPL) | nature communications | October, 2025 | scientific-paper | nanofrazor nanofrazor-explore thermal-scanning-probe | nature-communications | ||
| Ultrasound-driven programmable artificial muscles | Ultrasound-activated microbubble artificial muscles enable programmable, fast, lightweight actuation with high force density, scalability, and compliance, advancing soft robotics, wearable systems, and biomedical applications technologies. | Scientific Paper | Direct Writing, DWL 2000 | nature | October, 2025 | scientific-paper | direct-writing dwl-2000 | nature | ||
| Texture-engineered fabrication of ultraflat, 6-inch single-crystal Cu(111) wafers | Scalable fabrication of twin-boundary-free Cu(111) wafers enables ultraflat 6-inch substrates for high-quality wafer-scale graphene with excellent uniformity, low resistance, and high carrier mobility performance metrics. | Scientific Paper | Direct Writing, MLA 150 | Science Advances | October, 2025 | scientific-paper | direct-writing mla-150 | science-advances | ||
| Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging | Scalable batch-fabricated silicon AFM probes integrate ultra-sharp high-aspect-ratio tips and stair-shaped handles, enabling 5 nm resolution, unobstructed laser detection, compatibility, and durable high-fidelity nanoscale imaging. | Scientific Paper | Direct Writing, MLA 150 | Microsystems & Nanoengineering (nature) | October, 2025 | scientific-paper | direct-writing mla-150 | microsystems-nanoengineering-nature | ||
| Programmable diffractive deep neural networks enabled by integrated rewritable metasurfaces | Direct laser–written Sb2Se3 phase-change metasurfaces enable ultra-compact, low-loss, nonvolatile programmable photonic neural networks, achieving state-of-the-art accuracy in on-chip diffractive deep learning tasks. | Scientific Paper | Direct Writing, DWL 66+ | nature | October, 2025 | scientific-paper | direct-writing dwl-66 | nature | ||
| Single-Step 3D Patterning of Negative Resists via Maskless Aligner | Demonstrates single-step 3D patterning of negative resists using maskless aligner, enabling complex microstructures for biomedical, MEMS, and microfluidic applications. | Application Note | Direct Writing, Grayscale, MLA 150, MLA 300 | Heidelberg Instruments | October, 2025 | application-note | direct-writing grayscale mla-150 mla-300 | heidelberg-instruments | ||
| Independent Control of Quality Factor and Circular Dichroism via Intrinsic Chiral Plasmonic Bound States in the Continuum | 3D symmetry-broken plasmonic metasurfaces enable visible quasi-BIC resonances with independently tunable circular dichroism and Q-factors, achieving high chiroptical performance via nanoscale height-controlled architectures. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Laser & Photonics Reviews | September, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | laser-photonics-reviews | ||
| A Decade of Discovery: Heidelberg Instruments’ MLA 150 Maskless Aligner Turns 10 | Heidelberg Instruments proudly celebrates the 10th anniversary of the MLA 150 Maskless Aligner—a breakthrough that has redefined high-resolution lithography in cleanrooms around the world. | Press | MLA 150 | Heidelberg Instruments | September, 2025 | press | mla-150 | heidelberg-instruments | ||
| Manipulating Anisotropy of Second Harmonic Generation in NbOI2 via Precise Strain Engineering | Precisely oriented strain engineering in NbOI2 enhances second harmonic generation up to 19-fold, quantitatively linking strain direction with nonlinear susceptibility and enabling tunable 2D ferroelectric optoelectronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | September, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-functional-materials | ||
| Photodegradable Hydrogel Matrices for Spatiotemporal Control of Bacteria Transport and Delivery | Photodegradable PEG hydrogels enable spatiotemporal control of bacterial motion, speed, and delivery, guiding chemotaxis and controlled release for advanced living-material and therapeutic applications. | Scientific Paper | Direct Writing, DWL 66+ | ACS Applied Materials & Interfaces | September, 2025 | scientific-paper | direct-writing dwl-66 | acs-applied-materials-interfaces | ||
| µCodes: A Universal Grid Platform for Microscale Mapping, Microscopy Navigation, and Multimodal Imaging | µCodes is a microgrid system enabling precise sample tracking and image alignment across diverse optical and electron microscopy modalities. | Scientific Paper | Direct Writing, MLA 150 | Small | August, 2025 | scientific-paper | direct-writing mla-150 | small | ||
| Inkjet-Printed 3D Sensor Arrays with FIB-Induced Electrode Refinement for Low-Noise Amperometric Recordings in hiPSC-Derived Brain Organoids | Customizable 3D microelectrode arrays enable selective, low-noise recordings across organoid depths, overcoming planar MEA limits via inkjet printing, FIB milling, and electrodeposition for activity studies. | Scientific Paper | Direct Writing, µMLA | ACS Sensors | August, 2025 | scientific-paper | direct-writing %c2%b5mla | acs-sensors | ||
| Microscopic geared metamachines | Optically driven metasurfaces power on-chip micromachines, enabling lithographically fabricated gear trains and micromechanisms down to tens of micrometers with sub-micrometer precision and scalable integration capabilities. | Scientific Paper | Direct Writing, MLA 150 | nature communications | August, 2025 | scientific-paper | direct-writing mla-150 | nature-communications | ||
| Grayscale Exposure Challenges Using Direct-Write Laser Exposure on Thick Positive Resist | Poster by Gerda Ekindorf about grayscale exposure challenges using direct-write laser exposure on thick positive resists. | Poster | Direct Writing, DWL, DWL 66+, Grayscale | Gerda Ekindorf, Heidelberg Instruments, micro resist technology | August, 2025 | poster | direct-writing dwl dwl-66 grayscale | gerda-ekindorf heidelberg-instruments micro-resist-technology | ||
| Exposure of Sprayed Photoresist on KOH Etched Side Walls of a Silicon Wafer with Heidelberg Instruments DWL 66+ | The DWL 66+ enables precise photoresist patterning on KOH-etched silicon sidewalls, achieving superior resolution compared to traditional mask aligners. | Application Note | Direct Writing, DWL 66+ | Fraunhofer IMM, Heidelberg Instruments | August, 2025 | application-note | direct-writing dwl-66 | fraunhofer-imm-2 heidelberg-instruments | ||
| Josephson Junction Device Fabrication with the NanoFrazor | High-resolution, damage-free NanoFrazor lithography enables fast and reliable fabrication of Josephson junctions for quantum and nanoelectronics applications. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | August, 2025 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| High-Resolution Lift-Off Process with the NanoFrazor | This application note describes the NanoFrazor’s high-resolution lift-off process for creating sub-100 nm metal features with low line edge roughness using thermal lithography. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | August, 2025 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| Low-loss superconducting resonators fabricated from tantalum films grown at room temperature | Room-temperature growth of α-tantalum on silicon using niobium seed layers yields superconducting resonators with state-of-the-art quality factors, enabling low-thermal-budget integration for qubit circuits applications. | Scientific Paper | Direct Writing, MLA 150 | nature communications | August, 2025 | scientific-paper | direct-writing mla-150 | nature-communications | ||
| VPG 300 DI Maskless Stepper | Maskless direct imager for high-accuracy and high-resolution microstructures. | Data Sheet | VPG | Heidelberg Instruments | August, 2025 | data-sheet | vpg | heidelberg-instruments | ||
| VPG+ 1400 FPD / VPG+ 1850 FPD Volume Pattern Generators | High-volume photomask production on large substrates with extremely accurate alignment and fast, high-quality exposures. Perfect for flat panel display (FPD) applications. | Data Sheet | VPG | Heidelberg Instruments | August, 2025 | data-sheet | vpg | heidelberg-instruments | ||
| Heidelberg Instruments Enhances DWL 66+ Lithography System, Achieving Market-Leading 200 nm Resolution and 65,536 Grayscale Levels | Heidelberg Instruments has made significant performance upgrades to its renowned DWL 66+ direct-write lithography system, solidifying its position as the ultimate research tool for microfabrication. | Press | Direct Writing, DWL 66+, Grayscale | Heidelberg Instruments | July, 2025 | press | direct-writing dwl-66 grayscale | heidelberg-instruments | ||
| Volatile and non-volatile nano-electromechanical switches fabricated in a CMOS-compatible silicon-on-insulator foundry process | CMOS-compatible SOI foundry integration enables scalable silicon NEM switches with low-voltage operation, volatile and nonvolatile modes, paving high-density logic and memory for extreme environments. | Scientific Paper | Direct Writing, MLA 150 | Microsystems & Nanoengineering (nature) | July, 2025 | scientific-paper | direct-writing mla-150 | microsystems-nanoengineering-nature | ||
| Picoeukaryote-based biohybrid microrobots for active delivery in the kidney | Picoeukaryote-based biohybrid microrobots enable active drug delivery in confined environments, demonstrating strong motility, kidney penetration, long-term retention, biosafety, and immune evasion in vivo. | Scientific Paper | Direct Writing, MLA 150 | Science Advances | July, 2025 | scientific-paper | direct-writing mla-150 | science-advances | ||
| Confinement-Enhanced Core–Shell Avalanche Photodetectors | A SiO2-passivated Si nanowire/graphene nanoresonator enhances 1550 nm absorption and confined avalanche multiplication, achieving 56.6 A/W responsivity and 2.6×10⁴ gain for CMOS-compatible NIR photodetection. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Nano | July, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | acs-nano | ||
| Nanofabrication of All-Dielectric Metasurfaces through Pulsed Thermal Scanning Probe Lithography | Pulsed thermal scanning probe lithography enables sub-10 nm patterning on insulating silica without conductive layers, advancing all-dielectric metasurface fabrication and material compatibility in nanofabrication. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Scientific Reports | July, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | scientific-reports | ||
| Noninvasive Deterministic Nanostructures Lithography on 2D Transition Metal Dichalcogenides | Noninvasive t-SPL enables high-resolution nanolithography on transparent substrates, enabling tunable plasmonic nanostructures for applications in nanophotonics, sensing, and thermoplasmonics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Engineering Materials | June, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-engineering-materials | ||
| Hybrid-Contact Engineering for Enhanced P-Type Performance in WSe2 Field-Effect Transistors | Hybrid edge-top contacts in WSe2 FETs mitigate Fermi-level pinning, boosting p-type conduction, lowering contact resistance and Schottky barriers, enabling efficient complementary post-silicon electronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanotechnology | June, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | nanotechnology | ||
| Printed Conformal and Transparent Magnetoresistive Sensors for Seamless Integration and Environment-Resilient Touchless Interaction | Magnetic-field-aligned nanowires enable transparent, conformable magnetoresistive sensors with 85% transparency, high out-of-plane sensitivity, bending and stretching durability, touchless operation, and stable performance in environments applications. | Scientific Paper | Direct Writing, DWL 66+ | ACS Nano | June, 2025 | scientific-paper | direct-writing dwl-66 | acs-nano | ||
| DWL 66+ Ultimate Lithography Research Tool | Versatile system for research and prototyping with highest resolution and wide selection of options. | Data Sheet | DWL 66+ | Heidelberg Instruments | June, 2025 | data-sheet | dwl-66 | heidelberg-instruments | ||
| Fourier-Tailored Light–Matter Coupling in van der Waals Heterostructures | Fourier-patterned hBN/WS2 van der Waals heterostructures enhance exciton–waveguide coupling, enabling exciton-polariton formation near strong coupling for advanced optoelectronic and quantum devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Nano | May, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | acs-nano | ||
| Reconfigurable Artificial Synapses Based on Ambipolar Environmentally Stable Tellurium for Neuromorphic Computing | Ambipolar tellurium floating-gate devices enable nonvolatile memory with high retention, endurance, large on/off ratios, and reconfigurable excitatory–inhibitory synapses, achieving >90% accurate neuromorphic image recognition. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | May, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Semiconductor Review – Precision by Partnership in the Micro-Optics Era | Cover story of Semiconductor Review on how Heidelberg Instruments redefines precision through partnership in the micro-optics era. Interview with Heidelberg Instruments CEO Konrad Roessler. | Press | Semiconductor Review | May, 2025 | press | semiconductor-review | ||||
| Engineering flexible superblack materials | A scalable silicon-mold and polymer-casting platform produces flexible, durable superblack materials with 0.15% reflectance, angle-insensitive Lambertian behavior, and customizable surfaces for advanced optical applications. | Scientific Paper | Direct Writing, MLA 150 | nature communications | May, 2025 | scientific-paper | direct-writing mla-150 | nature-communications | ||
| MLA 150 Advanced Maskless Aligner | The fastest maskless tool for rapid prototyping, the perfect alternative to mask aligners. | Data Sheet | MLA 150 | Heidelberg Instruments | May, 2025 | data-sheet | mla-150 | heidelberg-instruments | ||
| Tunable chiral magneto-transport through band structure engineering in magnetic topological insulators Mn(Bi1−xSbx)2Te4 | Sb alloying in Mn(Bi,Sb)2Te4 tunes Berry curvature, spin chirality, and harmonic Hall responses, inducing topological transitions and reversible anomalous Hall effects for chiral spin-orbitronic devices. | Scientific Paper | Direct Writing, MLA 150 | Science Advances | May, 2025 | scientific-paper | direct-writing mla-150 | science-advances | ||
| Multifunctional Logic-in-Memory Circuits Based on Reconfigurable WSe2 Transistors via Enhanced Ambipolarity | Scanning probe lithography enhances ambipolar WSe2 transport, enabling nonvolatile reconfigurable memory, transistor, and diode modes with ~10¹⁰ on/off ratios, realizing ambient logic-in-memory circuits. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Nano | May, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | acs-nano | ||
| Grayscale exposure challenges using direct-write laser exposure on thick positive resist | Poster by Gerda Ekindorf about grayscale exposure challenges using direct-write laser exposure on ultra-thick positive photoresists. | Poster | Direct Writing, DWL 66+, Grayscale | Heidelberg Instruments | May, 2025 | poster | direct-writing dwl-66 grayscale | heidelberg-instruments | ||
| The Lithographer – Surface Issue | Surface Issue of The Lithographer, published in May 2025. How micro- and nanoscale features are engineered to drive innovation in research and industry. | The Lithographer | Direct Writing, Grayscale, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | May, 2025 | the-lithographer | direct-writing grayscale thermal-scanning-probe | heidelberg-instruments | ||
| Diffraction of Light from Optical Fourier Surfaces | Precisely fabricated optical Fourier surfaces show measured diffraction matching electrodynamic simulations, outperforming binary profiles and scalar models, enabling accurate Fourier-spectrum engineering for advanced holography and optical … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Photonics | April, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | acs-photonics | ||
| Combination of Thermal Scanning Probe Lithography and Directed Self-Assembly of Block Copolymers | Combining thermal scanning probe lithography with block copolymer self-assembly enables sub-20 nm, high-density quantum device patterning, achieving depth-amplified nanoholes and sub-10 nm placement accuracy. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | SPIE. Digital Library | April, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | spie-digital-library | ||
| Aptamer-Based Microfluidic Assay for In-Field Detection of Salicylic Acid in Botrytis cinerea-Infected Strawberries | A microfluidic aptamer assay enables rapid, sensitive salicylic acid detection in plants, supporting early infection diagnosis, field deployment, and improved crop management under climate change. | Scientific Paper | Direct Writing, DWL | MDPI | April, 2025 | scientific-paper | direct-writing dwl | mdpi | ||
| Spin wave perturbation in rare-earth iron garnet thin films with epitaxial strain relaxation | Epitaxial strain in YIG and LuIG thin films preserves magnetization and low damping, enhancing spin-wave transmission, while strain relaxation induces defects degrading performance for magnonic devices. | Scientific Paper | Direct Writing, DWL 66+ | APL Materials | April, 2025 | scientific-paper | direct-writing dwl-66 | apl-materials | ||
| Detection of Dynamic Temperature Modulation using a Thermal Scanning Probe Lithography (t-SPL) System | Thermal scanning probe lithography enables nanoscale thermal diffusivity measurement via localized periodic heating and temperature-wave phase analysis, achieving 10–100 nm resolution without miniaturized sensing. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | AIP Publishing | April, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | aip-publishing | ||
| Dynamic BIC in Customizable Hydrogel Metagratings for Advanced Information Security | Water-responsive hydrogel metagratings with grayscale thermal patterning enable humidity-tunable q-BIC resonances for multistage visible optical encryption and concealed Morse-code decryption. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | March, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-functional-materials | ||
| Challenges of photomask-based greyscale lithography with a highly-sensitive positive photoresist designed for >100µm deep greyscale patterns | Greyscale lithography enables 2.5D microstructures for micro-optics. The authors examine deep patterning in mr-P 22G_XP resist using mask aligners, resist aging effects, and suitable photomask requirements. | Scientific Paper | DWL 66+, Grayscale | SPIE. Digital Library | March, 2025 | scientific-paper | dwl-66 grayscale | spie-digital-library | ||
| Color astrophotography with a 100 mm-diameter f/2 polymer flat lens | A 100 mm achromatic diffractive lens for 400-800 nm, created with the DWL 66+, achieves high-resolution full-color imaging and reduced telescope weight. | Scientific Paper | DWL 66+ | Applied Physics Letters | March, 2025 | scientific-paper | dwl-66 | applied-physics-letters | ||
| Toward Phonon-Limited Transport in Two-Dimensional Transition Metal Dichalcogenides by Oxygen-Free Fabrication | An oxygen-free fabrication approach boosts MoS2 and WS2 FET mobility toward phonon limits, achieving record values and showing oxygen chemisorption critically degrades 2D transistor performance. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Nano | February, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | acs-nano | ||
| Hybrid Contact for High‐Performance MoS2 Transistors via Hard‐Mask Scanning Probe Lithography | Hard-mask scanning probe lithography enables hybrid contacts for MoS2 FETs, improving carrier injection, reducing contact resistance and Schottky barriers, achieving high on-current, large on/off ratios, and … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | January, 2025 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| ULTRA Semiconductor Mask Writer | A tool specifically designed to produce mature semiconductor photomasks. | Data Sheet | ULTRA | Heidelberg Instruments | November, 2024 | data-sheet | ultra | heidelberg-instruments | ||
| Heidelberg Instruments Reports Major Orders for the VPG+ 1400 FPD Volume Pattern Generator from Leading Asian Photomask Manufacturers | Heidelberg Instruments has secured two major orders for its VPG+ 1400 FPD Volume Pattern Generator from leading photomask manufacturers in Asia. | Press | VPG | Heidelberg Instruments | November, 2024 | press | vpg | heidelberg-instruments | ||
| Selective Placement of Functionalised DNA Origami via Thermal Scanning Probe Lithography Patterning | Thermal scanning probe lithography organized functionalized DNA origami into predefined nanoarrays with single-molecule precision, positioning gold nanoparticles and quantum dots for heterofunctional bionanotechnology applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Materials Advances | November, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | materials-advances | ||
| Quantitative Mapping of Smooth Topographic Landscapes Produced by Thermal Scanning-Probe Lithography | This work introduces FunFit, open-source software fitting analytical functions to SPM data, enabling precise fabrication, transfer, and feedback analysis of tSPL-patterned polymer and hBN nanoscale landscapes. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nature Protocols | October, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nature-protocols | ||
| The Lithographer – Interview with Dr. Nolan Lassaline | From classical optics to quantum electronics: A researcher’s journey inspired by thermal scanning probe lithography. Interview with Dr. Nolan Lassaline from TU Denmark. | The Lithographer | Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | October, 2024 | the-lithographer | thermal-scanning-probe | heidelberg-instruments | ||
| Fabrication of refractive micro-lenses for orbital angular momentum generation by direct laser writing and nanoimprint lithography | This application note describes the fabrication of refractive micro-lenses using Direct Laser Writing and Nanoimprint Lithography for generating orbital angular momentum in light waves. | Application Note | Direct Writing, DWL 66+, Nanoimprint Lithography | GermanLitho, Heidelberg Instruments | October, 2024 | application-note | direct-writing dwl-66 nanoimprint-lithography | germanlitho heidelberg-instruments | ||
| Nanoscale-Localized Multiplexed Biological Activation of Field Effect Transistors for Biosensing Applications | Thermal scanning probe lithography enables nanoscale, multiplexed biofunctionalization of FET biosensors, achieving sub-20 nm precision and ultrasensitive SARS-CoV-2 detection with graphene FETs. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanoscale | September, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nanoscale | ||
| High-resolution patterning of nanowire-based quantum devices with the NanoFrazor | The NanoFrazor offers a unique patterning solution, combining t-SPL and laser mix and match lithography. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | September, 2024 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| Liquid Metal Oxide-Assisted Integration of High-k Dielectrics and Metal Contacts for Two-Dimensional Electronics | Liquid metal oxide enables ultrathin high-k HfO2 integration on 2D semiconductors, achieving smooth interfaces, low-leakage WS2 transistors, minimal hysteresis, and scalable dielectric-contact stacking for nanoelectronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Nano | September, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | acs-nano | ||
| Damage-free nanolithography enabling superior device performance | Thermal scanning probe lithography enabled by NanoFrazor helps to fabricate devices with superior performance due to its damage-free patterning principle. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | September, 2024 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| Assembly and Bilayer Liftoff of Periodic Nanostructures with Sub-20 nm Resolution Using Thermal Scanning Probe Lithography | Optimized thermal scanning probe lithography achieved 10 nm resolution. Combined with bilayer liftoff, sub-20 nm metal structures were fabricated and validated for photonic dipole devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | MDPI | September, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | mdpi | ||
| Scalable Layer‐Controlled Oxidation of Bi2 O2 Se for Self‐Rectifying Memristor Arrays With sub‐pA Sneak Currents | UV-assisted oxidation created β-Bi2SeO5/Bi2O2Se heterostructure memristors with self-rectifying switching, high ON/OFF ratios, sub-pA sneak currents, sub-100 ns speed, low power, enabling scalable neuromorphic arrays. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | September, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| Deterministic grayscale nanotopography to engineer mobilities in strained MoS2 FETs | Engineered nanotopography induces tensile strain in MoS2 FETs, significantly enhancing carrier mobility and on-state current, promising advancements for 2D material-based electronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature communications | August, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nature-communications | ||
| NanoFrazor for Direct Nanoscale Chemical Conversion of Materials | Chemical conversion using a thermal scanning probe can be used to make biosensors with advanced architecture and tailor surface chemistry to create nanostructures. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | August, 2024 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| NanoFrazor | The NanoFrazor takes nanofabrication to the next level. Building on decades of research and development, the NanoFrazor brings thermal scanning probe lithography (t-SPL) into your laboratory. … | Data Sheet | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments, Heidelberg Instruments Nano | July, 2024 | data-sheet | nanofrazor thermal-scanning-probe | heidelberg-instruments heidelberg-instruments-nano | ||
| Vertical micropillars arrays with high aspect ratio submicron gap by metal assisted chemical etching as active components in new sensor devices | MacEtch, a plasma-free anisotropic etching method, produces sharp vertical silicon structures without ion damage, beneficial for sensors, X-ray optics, photovoltaics, vias, and bio-interfaces. | Application Note | Direct Writing, DWL 66+ | ETH Zürich, Heidelberg Instruments, Paul Scherrer Institute | July, 2024 | application-note | direct-writing dwl-66 | eth-zurich heidelberg-instruments paul-scherrer-institute | ||
| Fabrication of a hybrid device for the integration of light-triggered proton pumps | A novel method for fabricating a hybrid device that integrates light-triggered proton pumps into a network of nanochannels for applications in directed ion transport. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micro and Nano Engineering (ScienceDirect) | June, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | micro-and-nano-engineering-science-direct | ||
| Nano-Ironing van der Waals Heterostructures toward Electrically Controlled Quantum Dots | Nanoironing van der Waals heterostructures enhances interface quality, significantly improving electrical performance and enabling controlled quantum dot formation for advanced quantum technologies. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | June, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Prospects of nano-lithographic tools for the fabrication of surface-enhanced Raman spectroscopy (SERS) substrates | This review discusses and compares different lithographic techniques for fabricating SERS substrates, highlighting their strengths and limitations, and explores their potential for commercial applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micro and Nano Engineering (ScienceDirect) | June, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | micro-and-nano-engineering-science-direct | ||
| Wire suspended on a v-groove cavity to measure gas physical properties | Thermal flow sensors measure fluid flow by detecting heat dissipation from a heated wire. A novel silicon-based design compensates for fluctuations ensuring accuracy. | Application Note | Direct Writing, MLA 150 | Heidelberg Instruments, University of Twente | May, 2024 | application-note | direct-writing mla-150 | heidelberg-instruments university-of-twente | ||
| Hollow silicon-based microneedle array for dermal interstitial fluid extraction fabricated by only dry etching on wafer scale | Silicon-based microneedles enable interstitial fluid biomarker extraction. Proposed dry etching technique achieves mass production compatibility, enhancing biomedical applications for minimally invasive diagnostics and monitoring. | Application Note | Direct Writing, MLA 150 | EPFL, Heidelberg Instruments, Xsensio | May, 2024 | application-note | direct-writing mla-150 | epfl heidelberg-instruments xsensio | ||
| Chemically Amplified, Dry-Develop Poly(aldehyde) Photoresist | The effects of incorporating a base quencher into a poly(phthalaldehyde-co-propanal) photoresist to enhance the performance of dry-develop resist in a direct-write UV lithography tool. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ECS Journal of Solid State Science and Technology | May, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | ecs-journal-of-solid-state-science-and-technology | ||
| Thermal scanning probe and laser lithography for patterning nanowire based quantum devices | The NanoFrazor combines thermal scanning probe and laser writing lithography to fabricate InSb nanowire quantum devices, achieving quasi-ballistic transport with reduced fabrication-induced disorder. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanotechnology | April, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nanotechnology | ||
| µMLA Tabletop Maskless Aligner | Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules. | Data Sheet | µMLA | Heidelberg Instruments | April, 2024 | data-sheet | %c2%b5mla | heidelberg-instruments | ||
| Thermal nanoconversion of ferromagnetic nanoislands | This paper examines the use of thermal nanoconversion (TNC) to modify the magnetic properties of nickel-iron (Ni80Fe20) nanoislands. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Applied Physics Letters | March, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | applied-physics-letters | ||
| Tailored Micromagnet Sorting Gate for Simultaneous Multiple Cell Screening in Portable Magnetophoretic Cell‐On‐Chip Platforms | Novel technique for selectively sorting magnetic carriers and cells using a multi-notched disk micromagnet, enabling precise manipulation even in low magnetic fields. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | March, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-functional-materials | ||
| MLA 300 Industrial Maskless Aligner | Optimised for industrial production with highest throughput and seamless integration into industrial production lines. | Data Sheet | MLA 300 | Heidelberg Instruments | March, 2024 | data-sheet | mla-300 | heidelberg-instruments | ||
| Fabrication of a Silicon Electron Multiplier sensor using metal assisted chemical etching and its characterisation | SiEM sensor utilizing metal-assisted chemical etching to create high aspect ratio silicon pillars with charge multiplication capabilities. Electrical tests confirm compatibility with p–n junctions. | Scientific Paper | Direct Writing, DWL 66+ | ScienceDirect | March, 2024 | scientific-paper | direct-writing dwl-66 | sciencedirect | ||
| Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification | A novel method for amplifying the depth of grayscale nanopatterns in dielectric materials like SiO2 using a combination of t-SPL and optimized dry etching techniques. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Microsystems & Nanoengineering | February, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | microsystems-nanoengineering | ||
| Biosynthesis enhancement of tropodithietic acid (TDA) antibacterial compound through biofilm formation by marine bacteria Phaeobacter inhibens on micro-structured polymer surfaces | Microfluidic channels cultivate Phaeobacter inhibens biofilms on diverse polymer surfaces, offering biocontrol potential in aquaculture by mitigating antibiotic risks. Creating diverse surfaces to promote biosynthesis. | Application Note | Direct Writing, MLA 150 | Heidelberg Instruments, Technical University of Denmark (DTU) | February, 2024 | application-note | direct-writing mla-150 | heidelberg-instruments technical-university-of-denmark-dtu | ||
| Fraxicon for Optical Applications with Aperture ∼1 mm: Characterisation Study | This paper describes the fabrication and characterisation of a flat conical lens (fraxicon) with a diameter of 0.2 mm for use in miniaturised optical applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomaterials | January, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nanomaterials | ||
| Transistors platform for rapid and parallel detection of multiple pathogens by nanoscale-localized multiplexed biological activation | This paper describes a scalable and CMOS-compatible fabrication strategy for modifying individual field-effect transistors (FETs) with distinct bioreceptors. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature | January, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nature | ||
| Multi‐ and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and Nanofabrication | This paper describes a hybrid thermal lithography method that uses silk fibroin as a water-developable resist for the fabrication of micro and nanoscale structures. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Science | January, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-science | ||
| Achieving Reliable and Ultrafast Memristors via Artificial Filaments in Silk Fibroin | This paper investigates using biocompatible silk fibroin (SF) as a switching medium in silver/SF/gold (Ag/SF/Au) memristors. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | November, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| Generating smooth potential landscapes with thermal scanning-probe lithography | Scanning probe microscopy with a NanoFrazor achieves atomic precision, enabling controlled material manipulation and high-resolution lithography, with broad applications in photonics, electronics, and nanomaterials science. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Journal of Physics: Materials | November, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | journal-of-physics-materials | ||
| Thermal Scanning-Probe Lithography for Broad-Band On-Demand Plasmonic Nanostructures on Transparent Substrates | Thermal scanning-probe lithography (t-SPL) enables high-resolution nanolithography on transparent substrates with conductive oxide films, creating tunable plasmonic nanostructures for nanophotonics and sensing applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Nano Materials | October, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-nano-materials | ||
| Large Scale Fresnel Zone Plates On SiN-Membranes | This application note describes the fabrication process of Fresnel Zone Plates on a thin silicon nitride membrane substrate for X-ray optics using a DWL 66+. | Application Note | DWL 66+ | Heidelberg Instruments, XRnanotech | September, 2023 | application-note | dwl-66 | heidelberg-instruments xrnanotech | ||
| Small Projectiles Featuring Triple-Layer Metal Cladding with Potential Applications in the field of Cell Transfection | Micro-projectiles were created through maskless UV lithography, O2 plasma treatment, silicon etching, and metal cladding. These conical micro-projectiles have applications in magnetically guided cell transfection. | Application Note | Direct Writing, MLA 150 | Heidelberg Instruments, IDUN DTU | September, 2023 | application-note | direct-writing mla-150 | heidelberg-instruments idun-dtu | ||
| Superconducting nonlinear transport in optically driven high-temperature K3C60 | This study investigates the electrical responses of optically driven quantum material, revealing nonlinear current-voltage characteristics indicative of photo-induced superconductivity, with potential applications in high-speed devices. | Scientific Paper | Direct Writing, µMLA | nature communications | September, 2023 | scientific-paper | direct-writing %c2%b5mla | nature-communications | ||
| LUMINEQ Boosts Transparent Display Innovation with Cutting-Edge MLA 300 Laser Exposure Tool from Heidelberg Instruments | Lumineq Oy, a global leader in transparent display technology, has announced a strategic investment in state-of-the-art machinery. Press Release, Lumineq Oy, Sept. 11, 2023. | Press | Direct Writing, MLA 300 | Lumineq | September, 2023 | press | direct-writing mla-300 | lumineq | ||
| Complete logic operations in an ambipolar tellurium homojunction via non-invasive scanning probe lithography | Low-dimensional semiconductors, like tellurium nanoribbons, enable miniaturized logic devices via ambipolar conduction. Non-invasive lithography creates transistors performing all seven basic logic operations. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Device | September, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | device | ||
| Spin-acoustic control of silicon vacancies in 4H silicon carbide | Spin-acoustic control demonstrated on a 4H silicon carbide-based bulk acoustic resonator allows frequency-tunable probing of resonances, aiding in dynamic strain distribution analysis for microelectromechanical systems. | Scientific Paper | Direct Writing, MLA 150 | nature electronics | September, 2023 | scientific-paper | direct-writing mla-150 | nature-electronics | ||
| Exploiting Thermal Scanning Probe Lithography for the Fabrication of Micro and Nano Electronic Devices | Thermal scanning probe lithography enables fast fabrication of micro/nano structures with 100nm resolution, enhancing electronic performance through gold coating and resistivity characterization. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | 2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC) | September, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | 2023-international-conference-on-optical-mems-and-nanophotonics-omn-and-sbfoton-international-optics-and-photonics-conference-sbfoton-iopc | ||
| Nanopatterning of 2D materials by block copolymer self-assembly | Nanopatterning using block copolymer (BCP) self-assembly is a promising way to advancements in applications ranging from water treatment technologies to energy-efficient devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Technical University of Denmark (DTU) | August, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | technical-university-of-denmark-dtu | ||
| Nano-Rectennas for Harnessing Infrared Energy | This thesis optimizes MIM rectenna diodes via barrier engineering and scaling, improving responsivity, asymmetry and coupling efficiency, demonstrating enhanced THz rectification and proposing nanoscale rectenna fabrication. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Serdar B. Tekin | August, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | serdar-b-tekin | ||
| Novel Mixed-Dimensional hBN-Passivated Silicon Nanowire Reconfigurable Field Effect Transistors: Fabrication and Characterization | This work demonstrates a reconfigurable field-effect transistor (RFET) combining a Si nanowire with a 2D hBN dielectric, improving electrical characteristics and enabling dynamic polarity control. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | August, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Recent Advances in Direct Optical Patterning of Inorganic Materials and Devices | Direct patterning technology enables cost-effective design and production of devices, enhancing the fabrication of inorganic materials for optoelectronic, electronic, and energy applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Physics Research | August, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-physics-research | ||
| Phase Nanoengineering via Thermal Scanning Probe Lithography and Direct Laser Writing | Nanomaterials derive unique properties from their nanostructure. A perspective explores advanced nanofabrication techniques to modify properties in condensed matter systems, discussing applications and future prospects. | Scientific Paper | Direct Writing, DWL 66+, NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Technologies | August, 2023 | scientific-paper | direct-writing dwl-66 nanofrazor thermal-scanning-probe | advanced-materials-technologies | ||
| Bilayer Lift-Off for NanoFrazor Lithography | Explore bilayer lift-off with NanoFrazor lithography, addressing advantages, process details, and examples, including high-quality contacts and structures as small as 7 nm. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | July, 2023 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| Ultra-High Resolution Pattern Transfer on NanoFrazor Lithography | High-resolution lithography is crucial for current and future technologies, requiring dimension reduction. NanoFrazor lithography, multi-layer stacks, and alternative strategies for superior patterns are discussed. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | July, 2023 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| Fabrication Processes of Dual Compartment Microcontainers for Sequential Drug Release | This application note discusses microdevice-based drug delivery, focusing on dual compartment microcontainers (DCMCs) produced via maskless UV lithography. Potential for combination therapy is highlighted. | Application Note | Direct Writing, µMLA | Heidelberg Instruments, IDUN DTU | July, 2023 | application-note | direct-writing %c2%b5mla | heidelberg-instruments idun-dtu | ||
| High-sensitive two-dimensional PbI2 photodetector with ultrashort channel | This study reports a PbI2-based photodetector with the highest responsivity (172 A/W) achieved, using thermal scanning probe lithography for ultrashort channel fabrication to enhance performance. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Frontiers of Physics | July, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | frontiers-of-physics | ||
| Spin Transport in Superconducting and Ferromagnetic Heterostructures | This thesis engineers S/F and F/HM heterostructures, demonstrating high-quality Nb films, tunable spin transport, perpendicular anisotropy, and superconducting spin valves probing super spin currents via neutron … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Liam O'Brien | June, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | liam-obrien | ||
| VPG+ 200 / VPG+ 400 Volume Pattern Generator | A production tool for standard photomasks and microstructures in i-line resists. | Data Sheet | VPG | Heidelberg Instruments | June, 2023 | data-sheet | vpg | heidelberg-instruments | ||
| Vertical sidewalls in thick epoxy resist – a challenge for laser-based direct write lithography | Achieve straight, vertical sidewalls in thick negative-tone resist using focused laser beam-based direct write lithography, overcoming non-homogeneous illumination and non-sharp edges. (Possible application: MEMS) | Scientific Paper | Direct Writing, DWL 66+ | Micro and Nano Engineering (ScienceDirect) | June, 2023 | scientific-paper | direct-writing dwl-66 | micro-and-nano-engineering-science-direct | ||
| “Sauber und laufruhig im Reinraum” – ReinRaumTechnik 3/2023 | Energieführungssystem für die partikelfreie Halbleiterfertigung in den Anlagen von Heidelberg Instruments. Only available in German at this point. | Press | VPG | WILEY Verlag | May, 2023 | press | vpg | wiley-verlag | ||
| Overview on Maskless Grayscale Lithography | From design to micro structured topography: Grayscale lithography can be used to quickly fabricate various 2.5D and 3D structures at the micro scale. | Video | Grayscale | Heidelberg Instruments | May, 2023 | video | grayscale | heidelberg-instruments | ||
| Self-aligned single-electrode actuation of tangential and wineglass modes using PMN-PT | PMN–PT thin film disks, with single-electrode actuation, showcase self-aligned tangential and wineglass modes for high-frequency bulk acoustic wave (BAW) MEMS gyroscopes. | Scientific Paper | Direct Writing, MLA 150 | Microsystems & Nanoengineering (nature) | May, 2023 | scientific-paper | direct-writing mla-150 | microsystems-nanoengineering-nature | ||
| Multilevel diffractive lens in the MWIR with extended depth-of-focus and wide field-of-view | Compare inverse-designed and conventional lenses in MWIR optics. The inverse-designed lens offers better depth-of-focus and off-axis performance but with larger spot size and reduced efficiency. | Scientific Paper | Direct Writing, DWL 66+ | Optics Express | May, 2023 | scientific-paper | direct-writing dwl-66 | optics-express | ||
| MEMS micro-coils for magnetic neurostimulation | Innovative MEMS micro-coil probe fabrication overcame brain stimulation challenges, validated in vivo. International collaboration advances micro-magnetic stimulation for applications like artificial vision and hearing. | Scientific Paper | MLA 150 | Biosensors and Bioelectronics (ScienceDirect) | May, 2023 | scientific-paper | mla-150 | biosensors-and-bioelectronics-sciencedirect | ||
| Ultra-thick positive photoresist layers for maskless grayscale lithography | Grayscale lithography can create structured surfaces in photoresist for micro-optics applications. Experiments show promise in fabricating structures over 100 μm using a new experimental resist. | Scientific Paper | Direct Writing, DWL 66+, Grayscale | Heidelberg Instruments, SPIE. Digital Library | April, 2023 | scientific-paper | direct-writing dwl-66 grayscale | heidelberg-instruments spie-digital-library | ||
| Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography | Utilizing grayscale lithography and hard-mask methods, silicon carbide hosts micrometer-scale features and hemispherical solid immersion lenses, boosting optical collection for quantum emitters. Scalable, reproducible, CMOS-compatible. | Scientific Paper | Direct Writing, DWL 66+, Grayscale | Applied Physics Letters | April, 2023 | scientific-paper | direct-writing dwl-66 grayscale | applied-physics-letters | ||
| Normally-Off p-GaN Gate High-Electron-Mobility Transistors with the Air-Bridge Source-Connection Fabricated Using the Direct Laser Writing Grayscale Photolithography Technology | Fabrication of a p-GaN gate HEMT with an air-bridge source connection using direct grayscale lithography, achieving good performance with high breakdown voltage and low on-resistance. | Scientific Paper | Direct Writing, DWL 66+ | Crystals | April, 2023 | scientific-paper | direct-writing dwl-66 | crystals | ||
| Grayscale with GenISys 3D-PEC | We present the powerful software solution 3D-PEC of GenISys BEAMER for rapid and easy optimization of complex 3D microstructures fabricated with Grayscale laser lithography. | Application Note | Direct Writing, DWL 66+, Grayscale | GenISys GmbH, Heidelberg Instruments | March, 2023 | application-note | direct-writing dwl-66 grayscale | genisys-gmbh heidelberg-instruments | ||
| A New Method of AFM‐Based Nanolithography Using Frequency Enhanced Electrochemical Pressure Solution Etching | This paper investigates Frequency Enhanced Electrochemical Pressure Solution (FEEPS) as a novel nanolithography method for etching silica surfaces with an AFM tip. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Technologies | March, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials-technologies | ||
| Spectral tuning of Bloch Surface Wave resonances by light-controlled optical anisotropy | This work demonstrates dynamic control of resonant modes in a 2D bull’s eye cavity using optically-induced anisotropy, enabling precise tuning in metasurface-based optics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanophotonics | February, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | nanophotonics | ||
| Spin Transport and Associated Background Effects in All-Metallic Non-Local Spin Valves | This thesis investigates spin transport and relaxation mechanisms in all-metallic non-local spin valves across varied materials, temperatures and magnetic fields, clarifying spurious effects for low-power spintronic … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Alexander James Wright | February, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | alexander-james-wright | ||
| The choice of an autocorrelation length in dark‑field lung imaging | X-ray dark-field radiography (XDFR) explores lung microstructures. Porcine lungs exhibit similar extinction coefficients to PMMA spheres, emphasizing the critical autocorrelation length for effective clinical imaging. | Scientific Paper | Direct Writing, DWL 66+ | scientific reports (nature) | February, 2023 | scientific-paper | direct-writing dwl-66 | scientific-reports-nature | ||
| Shaping Interfaces for Manipulation and Imaging of Nano-Objects in Nanofluidic Confinement | This study demonstrates nanoscale particle manipulation using nanofluidic slits, thermal scanning probe lithography, and electrostatic interactions for sorting, trapping, and surface charge modulation applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ETH Zürich | January, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | eth-zurich | ||
| Ultrasensitive UV-C detection based on MOCVD-grown highly crystalline ultrawide bandgap orthorhombic κ-Ga2O3 | Orthorhombic κ-Ga2O3 is a superior ultrawide bandgap material for extreme environments. We demonstrate ultrasensitive UV-C detection using Si-doped κ-Ga2O3 photodetectors. | Scientific Paper | µPG | Applied Surface Science (ScienceDirect) | January, 2023 | scientific-paper | %c2%b5pg | applied-surface-science-science-direct | ||
| Visualizing bulk and edge photocurrent flow in anisotropic Weyl semimetals | Optoelectronic materials converting light to bulk current. Unveiling anisotropic photothermoelectric effect driving complex photocurrent circulations via unequal crystal-axis thermopowers, visualized using microscopy and magnetic imaging. | Scientific Paper | Direct Writing, µMLA | nature physics | January, 2023 | scientific-paper | direct-writing %c2%b5mla | nature-physics | ||
| Deterministic Thermal Sculpting of Large‐Scale 2D Semiconductor Nanocircuits | A scalable nanolithography method enables precise engineering of 2D TMD nanocircuits, like MoS2, for ultra-compact electronic and photonic devices with controlled thickness and excellent conductivity. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Interfaces | November, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials-interfaces | ||
| Optimization of Laser Written Photomasks for Photonic Device Manufacturing | Successful performance improvement of an ULTRA i-line laser writer for photonic device mask fabrication, reducing manufacturing costs. Thorough investigation and analysis identify optimal exposure strategies. | Scientific Paper | Mask-making, ULTRA | Heidelberg Instruments, SPIE. Digital Library | September, 2022 | scientific-paper | mask-making ultra | heidelberg-instruments spie-digital-library | ||
| Edge-Contact MoS2 Transistors Fabricated Using Thermal Scanning Probe Lithography | Thermal scanning probe lithography (t-SPL) fabricates MoS2-based field-effect transistors, achieving high on/off ratios without damaging materials, offering a gentle alternative to electron beam lithography. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | September, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Sequential Drug Release Achieved with Dual-Compartment Microcontainers: Toward Combination Therapy | Monodisperse dual-compartment microdevices with pH-sensitive polymer coatings enable tunable, sequential drug release in the gastrointestinal tract, providing a promising strategy for combination therapy. | Scientific Paper | Direct Writing, MLA 100 | Advanced Therapeutics | August, 2022 | scientific-paper | direct-writing mla-100 | advanced-therapeutics | ||
| Placement of Biological Membrane Patches in a Nanofluidic Gap With Control Over Position and Orientation | Purple membranes from Halobacterium salinarum are precisely positioned and oriented in nanofluidic confinement for integration into light-driven nanoscale hybrid devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Interfaces | July, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials-interfaces | ||
| Far-Field and Non-Intrusive Optical Mapping of Nanoscale Structures | This study analyzes far-field optical mapping of nanostructures using CLSM and radially polarized light, achieving 74 nm resolution for LDOS, crucial for high-density optical storage. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomaterials | July, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | nanomaterials | ||
| Direct Heat-Induced Patterning of Inorganic Nanomaterials | The HIPIN method uses heat-induced ligand transformation to pattern nanomaterials, enabling direct, wavelength-diverse lithography for advanced manufacturing of quantum dot electronic and optoelectronic devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Journal of the American Chemical Society | June, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | journal-of-the-american-chemical-society | ||
| Threshold voltage reliability in flexible amorphous In–Ga–ZnO TFTs under simultaneous electrical and mechanical stress | Flexible thin film transistors on 50 µm thick polyimide demonstrated stable behavior under simultaneous mechanical and electrical stress up to a 4 mm bending radius. | Scientific Paper | Direct Writing, DWL 66+ | Flexible and Printed Electronics | June, 2022 | scientific-paper | direct-writing dwl-66 | flexible-and-printed-electronics | ||
| Thermal scanning probe lithography | Thermal scanning probe lithography is a powerful nanofabrication method with 10 nm lateral resolution and 1 nm depth resolution, applicable in biomedicine, nanomagnetism, and nanoelectronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature reviews methods primer | May, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | nature-reviews-methods-primer | ||
| Fabrication of a fractal pattern device for focus characterizations of X-ray imaging systems by Si deep reactive ion etching and bottom-up Au electroplating | Si-based device using a fractal pattern for automatic focusing in high-resolution X-ray tomography. Achieves globally homogeneous visibility and local contrast with versatile X-ray energy applicability. | Scientific Paper | Direct Writing, DWL 66+ | Applied Optics | May, 2022 | scientific-paper | direct-writing dwl-66 | applied-optics | ||
| Fabrication of spin-orbit logic devices by thermal nanolithography | This work explores thermal scanning probe lithography (t-SPL) to fabricate devices with sub-50 nm features, enabling energy-efficient non-volatile computing and memory devices using 2D materials. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | April, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | ||||
| Anisotropic Particle Fabrication Using Thermal Scanning Probe Lithography | Nanoparticles’ optical and physicochemical properties are modulated via a novel, efficient nanolithographic method producing diverse monodispersed shapes, ensuring precise size, shape, and material control. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | April, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Single CdSe Quantum Dots Positioned in Nanostructured Heterogeneous Templates: Implications for High-Precision Nanoassembly | This work develops a multiphysical strategy for precise assembly of colloidal quantum dots using nanostructured templates, controlling electric fields, surface energy, and topography. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Nano Materials | April, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-nano-materials | ||
| NanoFrazor Explore Nanofabrication Tool | Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules. | Data Sheet | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | March, 2022 | data-sheet | nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| NanoFrazor Scholar Nanofabrication Tool | Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox. | Data Sheet | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | March, 2022 | data-sheet | nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| Poly-Alanine-ε-Caprolacton-Methacrylate as Scaffold Material with Tuneable Biomechanical Properties for Osteochondral Implants | Study of fabrication of artificial structures for musculo-skeletal tissue engineering, which was done by Two-Photon-Polymerization (TPP). | Scientific Paper | Two-Photon Polymerization (TPP) | International Journal of Molecular Sciences | March, 2022 | scientific-paper | two-photon-polymerization | international-journal-of-molecular-sciences | ||
| Thermal scanning probe lithography using Parylene C as thermal resist | Thermal scanning probe lithography with Parylene C as a thermal resist enables high-resolution (∼40 nm) patterning and direct pattern transfer using deep reactive ion etching. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micro & Nano Letters | February, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | micro-nano-letters | ||
| Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography | This paper reports on the fabrication and optical characterisation of large aperture diffractive lenses using greyscale lithography for use in a tunable zoom lens system. | Scientific Paper | DWL, Grayscale | International Iberian Nanotechnology Laboratory (INL) | February, 2022 | scientific-paper | dwl grayscale | international-iberian-nanotechnology-laboratory-inl | ||
| Rapid, Multianalyte Detection of Opioid Metabolites in Wastewater | Aptamer-based graphene field effect transistor (AptG-FET) platform detects three opioid metabolites in wastewater rapidly and inexpensively, providing a reliable alternative to costly laboratory-based techniques. | Scientific Paper | Direct Writing, µMLA | ACS Nano | February, 2022 | scientific-paper | direct-writing %c2%b5mla | acs-nano | ||
| Scanning Probe Lithography: State-of-the-Art and Future Perspectives | Scanning probe lithography (SPL) is a promising nanofabrication technique for nanoelectronics, data storage, and bioengineering, though it is still mainly used for prototyping. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micromachines | January, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | micromachines | ||
| Phase-Controllable Synthesis of Ultrathin Molybdenum Nitride Crystals Via Atomic Substitution of MoS2 | Novel atomic substitution method creates highly conductive nonlayered molybdenum nitrides from MoS2, enabling potential nanoelectronics’ applications with maintained conductivity and stable contacts over weeks. | Scientific Paper | µMLA | Chemistry of Materials | December, 2021 | scientific-paper | %c2%b5mla | chemistry-of-materials | ||
| DWL 2000 GS / DWL 4000 GS Industrial Grayscale Lithography | The most advanced industrial grayscale lithography tool on the market. | Data Sheet | DWL | Heidelberg Instruments | November, 2021 | data-sheet | dwl | heidelberg-instruments | ||
| Advanced MEMS/NEMS Fabrication and Sensors | This book introduces new and unique fabrication, micromachining, and integration manufacturing methods for MEMS and NEMS devices, as well as novel nanomaterials for sensor fabrications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature | October, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | nature | ||
| Tip-Based Nanomachining on Thin Films: A Mini Review | Mini review of AFM tip-based nanomachining on thin films, covering materials, applications, and future prospects in nanooptics, electronics, and data storage. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomanufacturing and Metrology | September, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | nanomanufacturing-and-metrology | ||
| Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint | This paper investigates hybrid processes for patterning mixed structures using thermal nanoimprint lithography (T-NIL) and direct write lithography (DWL) on ma-P1275G positive grayscale resist. | Scientific Paper | DWL, DWL 66+ | Paul Scherrer Institute | September, 2021 | scientific-paper | dwl dwl-66 | paul-scherrer-institute | ||
| Maskless Aligner Technology and the MLA 300 Drive Efficient Development and Production in Microstructures | This overview covers a paradigm shift in micro fabrication with the benefits of maskless aligners from Heidelberg Instruments and introduces the MLA 300. | Whitepaper | Direct Writing, MLA 300 | Heidelberg Instruments | August, 2021 | whitepaper | direct-writing mla-300 | heidelberg-instruments | ||
| Novel Tunnel Magnetoresistive Sensor Functionalities via Oblique-Incidence Deposition | We improve tunnel magnetoresistive (TMR) devices by precisely shaping magnetic layers with oblique-incidence deposition, enhancing TMR design and functionality without additional magnetic materials. | Scientific Paper | μPG 101 | ACS Applied Materials & Interfaces | July, 2021 | scientific-paper | %ce%bcpg-101 | acs-applied-materials-interfaces | ||
| Freeform nanostructuring of hexagonal boron nitride | Hexagonal boron nitride (hBN), now available as atomically smooth flakes, offers unique properties in optoelectronics and nanoelectronics. Researchers demonstrate freeform nanostructuring for advanced device architectures. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | arXiv Physics/Optics | May, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | arxiv-physics-optics | ||
| Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8 | Low-power laser irradiation of SU-8 photoresist with an added absorber enables selective pyrolysis for simple and inexpensive patterning of pyrolytic carbon microelectrodes. | Scientific Paper | Direct Writing, µPG | Micromachines | April, 2021 | scientific-paper | direct-writing %c2%b5pg | micromachines | ||
| Interferometric scattering of a single plasmonic nanoparticle cluster assembled in a nanostructured template | Examining single Au nanoparticle cluster light scattering on nanostructured substrates, revealing two substrate effects via Green’s tensor theory for plasmonic nanostructure spectral interpretation. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Optics Express | April, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | optics-express | ||
| Cost and Time Effective Lithography of Reusable Millimeter Size Bone Tissue Replicas With Sub-15 nm Feature Size on A Biocompatible Polymer | Bio-tSPL enables cost-effective, high-precision fabrication of reusable, biocompatible 3D bone tissue replicas for stem cell culture, tissue-mimetic biofunctionalization, drug testing, and regenerative medicine. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | February, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-functional-materials | ||
| Evidence for metastable photo-induced superconductivity in K3C60 | Intense optical pulses induce transient superconductivity, evolving into stable states in K3C60 under sustained mid-infrared excitation, characterized by low resistance and extended lifetimes. | Scientific Paper | Direct Writing, µMLA | nature physics | February, 2021 | scientific-paper | direct-writing %c2%b5mla | nature-physics | ||
| Structurally and morphologically engineered chalcogenide materials for optical and photonic devices | This paper explores advanced techniques like multiphoton lithography and thermal scanning probe lithography for patterning chalcogenide materials, enabling nanoscale features and functional photonic devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Journal of Optical Microsystems | January, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | journal-of-optical-microsystems | ||
| Nanofabrication of graphene field-effect transistors by thermal scanning probe lithography | Thermal scanning probe lithography (t-SPL) shows promise for scalable nanofabrication in nanoelectronics. It produces high-performance graphene-based transistors with simplified processing, reducing time and cost. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | APL Materials | January, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | apl-materials | ||
| Deterministic Assembly of Single Sub-20 nm Functional Nanoparticles Using a Thermally Modified Template with a Scanning Nanoprobe | A deterministic technique uses hot scanning nanoprobes to assemble sub-20 nm nanoparticles, including quantum dots, into 2D arrays and complex nanostructures for various applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | November, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| The Lithographer – Quantum Issue | Quantum Issue of The Lithographer, published in October 2020. Topics include: Quantum Technology, Maskless Aligners, Grayscale Lithography, 2D Materials. | The Lithographer | Direct Writing, Grayscale, NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | October, 2020 | the-lithographer | direct-writing grayscale nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| Thermomechanical Nanostraining of Two-Dimensional Materials | Nanoindentation via thermomechanical scanning probe allows precise, nanoscale strain engineering in 2D materials like MoS2 and graphene, achieving modulated bandgaps and investigating localized strain effects. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nano Letters | October, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | nano-letters | ||
| The Potential of Combining Thermal Scanning Probes and Phase-Change Materials for Tunable Metasurfaces | Metasurfaces enable versatile optical wavefront control; active phase-change materials like germanium telluride offer compact, reconfigurable near-infrared metasurfaces, avoiding typical limitations. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Optical Materials | October, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-optical-materials | ||
| A cleanroom in a glovebox | Our glovebox-integrated cleanroom achieves fabrication, characterization, and reduced facility costs in an oxygen-free and clean environment, enabling exploration of new materials, quantum phases and devices. | Scientific Paper | μPG 101 | Review of Scientific Instruments | July, 2020 | scientific-paper | %ce%bcpg-101 | review-of-scientific-instruments | ||
| Neurite guidance and neuro-caging on steps and grooves in 2.5 dimensions | We investigate neurite guidance using semiconductor industry-compatible techniques for fabricating modulated surfaces, enabling the cultivation and study of ordered neuronal networks in a 2.5D configuration. | Scientific Paper | DWL 66+, Grayscale | Nanoscale Advances | July, 2020 | scientific-paper | dwl-66 grayscale | nanoscale-advances | ||
| Nanometer scale resolution, multi-channel separation of spherical particles in a rocking ratchet with increasing barrier heights | This nanoparticle size-separation device uses a nanofluidic Brownian motor with electrostatic barriers, achieving a separation resolution of approximately 2 nm for gold particles. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Physical Review Applied | July, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | physical-review-applied | ||
| Inverse-designed achromatic flat lens enabling imaging across the visible & near-infrared with diameter > 3mm | A flat lens, designed through inverse design with a phase-only pupil function, achieves achromatic focusing over a broad spectrum in a single diffractive surface. | Scientific Paper | DWL 66+, Grayscale | Applied Physics Letters | July, 2020 | scientific-paper | dwl-66 grayscale | applied-physics-letters | ||
| Spatial defects nanoengineering for bipolar conductivity in MoS2 | Controlling defects in monolayer MoS2 using thermochemical scanning probe lithography enables precise p- and n-type doping, vital for nanoelectronics, p-n junctions, and high rectification ratios. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature communications | July, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | nature-communications | ||
| Thermomechanical Nanocutting of 2D Materials | A thermomechanical indentation technique enables precise cutting of monolayer 2D with 20 nm resolution, offering potential for electronic and photonic nanodevice fabrication. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | June, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| Optical Fourier surfaces | Thermal Scanning Probe Lithography and templating creating optical surfaces containing multiple specified sinusoids, enabling advanced diffractive optics, photonics, and applications in emerging photonics fields. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments, nature | June, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | heidelberg-instruments nature | ||
| Direct Patterning of Metal Chalcogenide Semiconductor Materials | A low-cost, high-resolution direct patterning method using metal-organic precursors enables fabrication of 2D/3D semiconductor structures with sub-50 nm resolution for various nanodevices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | May, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-functional-materials | ||
| Cubic Microcontainers Improve In Situ Colonic Mucoadhesion and Absorption of Amoxicillin in Rats | Microcontainers enhance colonic drug delivery by influencing mucoadhesion and absorption. Cubic microcontainers show better adherence and absorption of amoxicillin compared to cylindrical and triangular ones. | Scientific Paper | Direct Writing, MLA 100 | Pharmaceutics (MDPI) | April, 2020 | scientific-paper | direct-writing mla-100 | pharmaceutics-mdpi | ||
| Thermal scanning probe lithography – a review | Review of Thermal Scanning Probe Lithography (t-SPL) covering its capabilities for high-resolution nanolithography and material interactions, providing insights for nanofabrication and material science challenges. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments, Microsystems & Nanoengineering (nature) | April, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | heidelberg-instruments microsystems-nanoengineering-nature | ||
| Nano/Microscale Thermal Field Distribution: Conducting Thermal Decomposition of Pyrolytic-Type Polymer by Heated AFM Probes | This study investigates temperature distribution between heated AFM tips and materials, using PPA film to create programmable nano/microscale pyramid structures for scanning thermal microscopy applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomaterials | March, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | nanomaterials | ||
| Impact of massive parallelization on two-photon absorption micro- and nanofabrication | In this paper, massive parallelization is demonstrated which was realized by using a beam splitting diffractive optical element (DOE). | Scientific Paper | Two-Photon Polymerization (TPP) | SPIE. Digital Library | March, 2020 | scientific-paper | two-photon-polymerization | spie-digital-library | ||
| Large-area, high-numerical-aperture multi-level diffractive lens via inverse design | Inverse design enables the creation of thin, high-NA flat lenses. Multi-level diffractive lens (MDL) with a NA=0.9 at 850 nm wavelength, replicable via imprint lithography. | Scientific Paper | DWL 66+, Grayscale | Heidelberg Instruments, Optica | March, 2020 | scientific-paper | dwl-66 grayscale | heidelberg-instruments optica | ||
| The Lithographer – Grayscale Issue | Grayscale Lithography Issue of The Lithographer, published in January 2020. The Rise of Grayscale Lithography: Direct-write 3D patterning scaled from µm to nm. | The Lithographer | Grayscale | Heidelberg Instruments | January, 2020 | the-lithographer | grayscale | heidelberg-instruments | ||
| Optically Inspired Nanomagnonics with Nonreciprocal Spin Waves in Synthetic Antiferromagnets | A versatile platform utilizes spin waves for optically inspired wave-based processing, advancing nanoscale devices with wavefront engineering, focusing, interference, and unique properties. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | January, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| 3D-printed Optics: Focused femtosecond pulses print optical components with subdiffraction-limited resolution | High-precision 3D printing provides a wide range of freedom in design for industrial fabrication of advanced optical components and products. LFW December Issue/2019 | Scientific Paper | Two-Photon Polymerization (TPP) | Laser Focus World | December, 2019 | scientific-paper | two-photon-polymerization | laser-focus-world | ||
| Laser Heat-Mode Lithography: Principle and Methods | This book explains laser heat-mode lithography, covering principles, system design, feature size manipulation, and applications, offering a versatile, simple, and tunable approach for nanofabrication. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | November, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | ||||
| Light-induced anomalous Hall effect in graphene | Optical driving in quantum solids uncovers phenomena like light-induced superconductivity and anomalous Hall effect in graphene, revealing Floquet-engineered topological band structures. | Scientific Paper | Direct Writing, µMLA | nature physics | November, 2019 | scientific-paper | direct-writing %c2%b5mla | nature-physics | ||
| Deterministic Deposition of Nanoparticles with Sub-10 nm Resolution | A nanofluidic slit method enables precise nanoparticle placement using geometry-induced energy landscapes, achieving 8 nm accuracy with electrostatic trapping, focusing, and adhesive contact. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nano Letters | November, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | nano-letters | ||
| Sub-10 nm Resolution Patterning of Pockets for Enzyme Immobilization with Independent Density and Quasi-3D Topography Control | The study demonstrates thermochemical scanning probe lithography (tc-SPL) for precise enzyme nanopatterning on polymer surfaces, achieving single-enzyme resolution, high throughput, and controlled enzyme density. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | October, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Diffractive flat lens enables extreme depth-of-focus imaging | Multi-level diffractive lens (MDL) designs drastically enhance depth of focus by over 4 orders of magnitude, enabling focus maintenance for objects separated by large distances. | Scientific Paper | Grayscale, μPG 101 | arXiv Physics/Optics | October, 2019 | scientific-paper | grayscale %ce%bcpg-101 | arxiv-physics-optics | ||
| Phase masks for electron microscopy fabricated by thermal scanning probe lithography | Silicon-nitride phase masks are fabricated using thermal scanning probe lithography, avoiding ion implantation, offering high accuracy, and generating electron vortex and Bessel beams. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micron | October, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | micron | ||
| Scanning Probe Thermometry to study Thermoelectricity and Dissipation at Nanoscale Junctions | This thesis explores heat transport and dissipation in nanoelectronics using high-resolution scanning probe thermometry, revealing nanoscale thermal phenomena, defects, and thermoelectric effects. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ETH Zürich | August, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | eth-zurich | ||
| Oxidation and Thermal Scanning Probe Lithography for High-Resolution Nanopatterning and Nanodevices | Scanning probe lithography (SPL) offers high resolution, precise positioning, and material versatility, but its throughput limitations can be addressed through mix-and-match lithography strategies. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Electrical Atomic Force Microscopy for Nanoelectronics | August, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | electrical-atomic-force-microscopy-for-nanoelectronics | ||
| Imaging over an unlimited bandwidth with a single diffractive surface | With the control of the phase in the image plane, a single diffractive surface can correct chromatic aberrations over a wide bandwidth, simplifying imaging systems. | Scientific Paper | Grayscale, μPG 101 | arXiv Physics/Optics | July, 2019 | scientific-paper | grayscale %ce%bcpg-101 | arxiv-physics-optics | ||
| Manufacturing strategies for scalable high-precision 3D printing of structures from the micro to the macro range | Two-photon absorption (TPA) provides freedom in design for the fabrication of novel products that are not feasible with conventional techniques. | Scientific Paper | Two-Photon Polymerization (TPP) | Advanced Optical Technologies | May, 2019 | scientific-paper | two-photon-polymerization | advanced-optical-technologies | ||
| Replication of a Tissue Microenvironment by Thermal Scanning Probe Lithography | Thermal scanning probe lithography (t-SPL) efficiently creates biocompatible nanoscale topographies for cell culture, enabling rapid prototyping of substrates for studying cell-matrix interactions. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | May, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| High-throughput protein nanopatterning | This work demonstrates high-throughput, sub-10 nm enzyme nanopatterning using thermochemical scanning probe lithography (tc-SPL), advancing bio-nanotechnology and molecular-level biological studies. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Faraday Discussions | March, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | faraday-discussions | ||
| Ultra compact electrochemical metallization cells offering reproducible atomic scale memristive switching | Miniaturized Ag/SiO₂/Pt memristors enabling fast, low-energy, and highly reproducible atomic-scale switching for next-generation non-volatile memory applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Communications Physics | March, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | communications-physics | ||
| Monolayer MoS2 Nanoribbon Transistors Fabricated by Scanning Probe Lithography | This work demonstrates the fabrication of 30 nm monolayer MoS2 nanoribbon field-effect transistors using scanning probe lithography, achieving high performance with channel widths below 100 nm. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nano Letters | February, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | nano-letters | ||
| Patterning metal contacts on monolayer MoS2 with vanishing Schottky barriers using thermal nanolithography | Thermal Scanning Probe Lithography enables precise metal electrode patterning on 2D semiconductors like MoS2, improving device performance with vanishing Schottky barriers and exceptional properties. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature electronics | January, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | nature-electronics | ||
| Combination of Thermal Scanning Probe Lithography and Ion Etching to Fabricate 3D Silicon Nanopatterns with Extremely Smooth Surface | Thermal scanning probe lithography enables nanoscale prototyping, but dry etching increases roughness. Optimized ion-beam polishing using a polymer mask achieved sub-nanometer smooth silicon surfaces. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ScienceDirect | June, 2018 | scientific-paper | nanofrazor thermal-scanning-probe | sciencedirect | ||
| Nanofluidic rocking Brownian motors | Creating precise nanofluidic slits, utilizing electrostatic forces and oscillating fields, enables controlled transport of nanoparticles, demonstrated with 60nm gold spheres and efficient sorting of particles. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Science | March, 2018 | scientific-paper | nanofrazor thermal-scanning-probe | science | ||
| Broadband imaging with one planar diffractive lens | Achromatic diffractive lenses (ADLs) enable imaging across the visible spectrum, achieving diffraction-limited focusing and high numerical aperture. Cost-effective and scalable for widespread use. | Scientific Paper | Grayscale, μPG 101 | scientific reports (nature) | February, 2018 | scientific-paper | grayscale %ce%bcpg-101 | scientific-reports-nature | ||
| Low-loss buried AlGaAs/AlOx waveguides using a quasi-planar process | Via-hole oxidation process for forming buried oxide-confined waveguides, resulting in straight, low-loss waveguides with smooth interfaces, simplifying III-V-semiconductor-oxide photonic device fabrication. | Scientific Paper | DWL | HAL open science | October, 2017 | scientific-paper | dwl | hal-open-science | ||
| Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology | First experimental demonstration of vertically-coupled micro-disk resonators to buried access waveguides on III-V semiconductor using simplified three-dimensional integration scheme, achieving high-quality devices. | Scientific Paper | Direct Writing, DWL | HAL open science | October, 2017 | scientific-paper | direct-writing dwl | hal-open-science | ||
| High-Aspect Ratio Nanopatterning via Combined Thermal Scanning Probe Lithography and Dry Etching | Thermal scanning probe lithography enables rapid nanofabrication in resist. Combined with optimized plasma etching, hard masks and heat treatment, shallow patterns were amplified 100× into silicon, … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ScienceDirect | August, 2017 | scientific-paper | nanofrazor thermal-scanning-probe | sciencedirect | ||
| Symmetry breaking of the surface mediated quantum Hall Effect in Bi2Se3 nanoplates using Fe3O4 substrates | Bottom surface-induced ferromagnetism in Bi2Se3 nanoplate devices on SiO2 and ferromagnetic insulator substrates decouples quantum Hall effects, revealing shifted half-integer QHEs in a three-channel model. | Scientific Paper | Direct Writing, μPG 101 | IOP Science | January, 2017 | scientific-paper | direct-writing %ce%bcpg-101 | iop-science | ||
| Increasing the density of passive photonic integrated circuits via nanophotonic cloaking | We utilize nanophotonic cloaking to enable closer spacing of photonic-integrated devices, overcoming signal cross-talk limitations. Experimental results demonstrate efficient transmission and compact designs. | Scientific Paper | Grayscale, μPG 101 | nature communications | November, 2016 | scientific-paper | grayscale %ce%bcpg-101 | nature-communications | ||
| Outdoor measurements of a photovoltaic system using diffractive spectrum-splitting and concentration | Photovoltaic system combining spectrum splitting and concentration using a planar diffractive optic, overcoming losses in single-bandgap absorbers & achieving a 25% increase in output power. | Scientific Paper | Direct Writing, μPG 101 | AIP Advances | September, 2016 | scientific-paper | direct-writing %ce%bcpg-101 | aip-advances | ||
| Direct Write Optical Waveguide Fabrication in organic films using a Heidelberg Laser Writer | Cheap and quick fabrication of mr-DWL waveguides channels on glass buried in optical polymer cladding with 350 µm radius ring resonators and 0.9 µm spacing. | Scientific Paper | Direct Writing, DWL 66+ | Rochester Institute of Technology | May, 2016 | scientific-paper | direct-writing dwl-66 | rochester-institute-of-technology | ||
| Thermoelectric Properties of Band Structure Engineered Topological Insulator (Bi1− xSbx)2Te3 Nanowires | Nanowires are promising for thermoelectric applications, but the predicted performance enhancement has not been observed yet. Surface states play a crucial role in transport characteristics. | Scientific Paper | Direct Writing, μPG 101 | Advanced Energy Materials | May, 2015 | scientific-paper | direct-writing %ce%bcpg-101 | advanced-energy-materials | ||
| From regular periodic micro-lens arrays to randomized continuous phase profiles | For industrial illumination systems, micro-optical structures made via direct grayscale lithography achieve precise multi-wavelength intensity control, efficiency, and flexibility at a cost-effective production scale. | Scientific Paper | Direct Writing, DWL 66+ | Advanced Optical Technologies | February, 2015 | scientific-paper | direct-writing dwl-66 | advanced-optical-technologies |
