In 2024, we celebrated our 40th anniversary. We invite you to scroll through some of the highlights of our history.
Re-discover old lithography systems, always leading-edge in their times, see some of our previous buildings, and discover the exciting story of our company!
Milestones of Heidelberg Instruments' History
1984
Foundation
Heidelberg Instruments was founded by a group of scientists and researchers from the University of Heidelberg, the European Molecular Biology Laboratory (EMBL), and other research institutes, with the aim to create commercial products based on their laser scanning technology and bring them to market.
1984 - 1988
The Founding Years
In the first years, the company developed a variety of tools: a line-profile measurement system for micron and submicron structures, a confocal laser scanning microscope module, a laser writer to write microstructures on resist-coated substrates, a wafer inspection system, and a laser tomographic scanner.
1989
Restructuring
Foundation of Heidelberg Instruments Mikrotechnik GmbH
In the first years, the company developed a variety of tools: a line-profile measurement system for micron and submicron structures, a confocal laser scanning microscope module, a laser writer to write microstructures on resist-coated substrates, a wafer inspection system, and a laser tomographic scanner.
1991
The First DWL
The direct laser write system DWL2.0 was specifically designed for the manufacture of gate-arrays and sea-of-gate ASICS. It was developed within the framework of the European ESPRIT program, and marketed under the Lasarray name. Heidelberg Instruments was temporarily part of that Swiss company until 1993.
1994
The Move to Rohrbach
With the initial growth of the young company came the need to move out of the Heidelberg Technology Park into new and larger premises in the South of Heidelberg. In 1999 the second floor was added and the building affectionately known as „Halle 1“ served as company headquarters until 2021.
1995
DWL66
The first system specifically designed for low volume, high-precision direct patterning was developed for research institutes and universities. It was called DWL66, referring to the 6″ x 6″ exposure area. The DWL66 filled the requirement of an R&D tool, which was less costly than a DWL2.0.
1994 - 1996
The Mask Write and OEM Agreement with Gerber
The Mask Write 800 (with large exposure area of 800 mm x 600 mm) was a high-resolution system aimed at applications in the industrial photomask production for PCB and backend. During a collaboration with the Gerber corporation (USA), the Mask Write 1550 was created, a writer for 1.55 m photomasks used for plasma display production.
1996 - 2002
Global Presence
Several Mask Write 1550 systems were installed in Japan and Korea. Customer support offices were founded in Taiwan, China, the US, and Japan, reflecting the increased market presence and expansion in those areas. In 2005, the Korea office was opened.
2002
Growth
The new production building – the first building constructed and owned by Heidelberg Instruments Mikrotechnik – marked a considerable increase in production capacity.
2006
The First Tabletop System
The first tabletop micro pattern generator, the µPG101, was launched in 2006. During these years, Heidelberg Instruments also developed other laser machines for the industrial market. While they were not successful in the long run, their development widened the technological skills in the company such as use of spacial light modulators for lithography.
2007
The VPG
Large Area Systems
A new type of system with high exposure speed, optimized for photomask production in the fields of chip packaging, LCD, and touch panels was developed. The first “Volume Pattern Generator” VPG 800 was installed at a PCB maker in Taiwan to write photomasks for chip packaging applications.
2013
The VPG
Small Area Systems
The large area volume pattern generators were followed by the VPG systems for small area writing, aimed at direct-write applications mainly in small and mid-volume mask production, rapid prototyping, microfluidics, MEMS, advanced packaging, and LED production.
2015
A Part of Perpetuity
Until 2015, HIMT was a mainly family-owned company with minority shares among the management. RAG foundation Investment Company (RSBG) acquired 100 percent of Heidelberg Instruments. The RSBG finances the “Ewigkeitsaufgaben” (perpetual mine management obligations) resulting from the hard coal-mining operations in Germany.
2017
A Success Story: Launching the Maskless Aligners
With the introduction of the MLA Series, Heidelberg Instruments brought a new generation of Maskless Aligner Systems to the market. The MLA is a high-performance maskless direct exposure system designed for easy operation and high-speed patterning. It was marketed specifically to be able to replace Mask Aligners or Steppers.
2018
Launch of the ULTRA
In 2018, the ULTRA was introduced as the semiconductor writer for mature photomasks. It was based on VPG+ technology, but with higher specifications for precision, stability, and resolution.
2018
Nanostructuring: The Portfolio Expands
In 2018, Heidelberg Instruments acquired the majority of SwissLitho AG. The Swiss company’s systems were based on thermal scanning probe lithography (t-SPL) for nanopatterning applications. The NanoFrazor technology involves a heated tip that writes nanostructures into a resist.
2019
The MLA Family Grows
The MLA 300 was released: The Maskless Aligner for high-throughput applications, fulfilling industry requirements such as increased throughput, full automation, and interfacing to manufacturing execution systems. The tabletop Maskless Aligner, now integrating features of the popular µPG, was relaunched as the µMLA.
2021
True 3D with TPP
Heidelberg Instruments were joined by the German company Multiphoton Optics, a solution provider in 3D laser lithography based on Two-Photon Polymerization (TPP) technology. The TPP-System MPO 100 was introduced as a Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures.
2021
Relocation and ISO Certification
Heidelberg Instruments moved to new premises and in the same year received its ISO 9001:2015 certification from the TÜV Süd (an auditor and provider of safety, security and sustainability solutions) for its Quality Management System.
2021
Part of the LAB14 Group
Heidelberg Instruments is now part of the LAB14 group within the RSBG. This group consists of high-tech companies which offer complementary products and services for nano- and microfabrication and surface analysis.
2024
Celebration
Heidelberg Instruments celebrates its 40th anniversary. Since 1984, we have been working passionately on developing and producing lithography solutions. Over the past four decades, our company has established itself firmly as one of the global market leaders in the direct write lithography sector and continues to grow strongly.
