MLA 150 Maskless Aligner

The paper presents a scalable microfabrication process for all-gold EM grids that enables high-resolution cryo-EM and geometry-guided cellular organization through anisotropic foil holes.

A novel conductometric IDE sensor using cTnI nanoMIPs enables rapid, sensitive, selective, and noninvasive cTnI detection in saliva, achieving a 0.08 fM detection limit with minimal sample volume.

A rapid microfluidic assay enables highly sensitive quantification and functional monitoring of EML4-ALK, supporting real-time assessment of cancer treatment response.

MoS₂/WSe₂ moiré superlattices enable coherent, room-temperature telecom light sources integrated with silicon photonics, offering enhanced emission and long coherence for on-chip photonic applications.

A symmetry-engineered THz metasurface uses quasi-BICs to control chiral response, polarization conversion, and circular dichroism through tunable radiative leakage and Q-factor modulation.

KINESIS is a nanopillar-based, potassium-selective biosensor enabling label-free, single-cell monitoring of K⁺ dynamics in hiPSC-cardiomyocytes, supporting cardiotoxicity screening and patient-specific disease modeling with high spatial resolution.

Skin-interfaced microfluidic capsule and portable lab-on-a-disc quantify sweat folate, enabling noninvasive prenatal nutrient monitoring with strong sweat-serum correlation and daily supplementation tracking for point-of-care assessment.

Researchers demonstrate a compact integrated Mamyshev oscillator delivering nanojoule, femtosecond pulses with fiber-laser-level performance, enabling on-chip supercontinuum generation and high-performance terahertz spectroscopy without external amplification.

Wireless BICEP continuously monitors biomarkers in blood and interstitial fluid, revealing distinct, individualized molecular kinetics and improving personalized health monitoring through integrated dual-compartment biosensing.

A suspended germanium-on-silicon photonic platform enables low-loss long-wave infrared operation and on-chip ethanol sensing, extending mid-infrared integrated photonics beyond 8 μm wavelengths.

Ultrathin gold-film chemiresistors enable scalable, low-power biosensing, with thinner films and shorter PEG-chain SAMs improving sensitivity, response speed, and streptavidin detection performance through surface molecular engineering.

A CMOS-compatible, resist-free silicon-trench method fabricates cleaner Josephson junctions for superconducting qubits, reducing contamination, improving scalability, and achieving qubit relaxation times up to 184 microseconds.

Lithographic method fabricates free-standing SUEX microparticles without substrates, achieving near-100% yield, supporting complex geometries, and enabling scalable, programmatic design of large particle libraries via Nazca Python.

Over the past decade, maskless aligners have transformed lithography by eliminating photomasks, enabling rapid design iteration, high-precision patterning, and faster microfabrication workflows in research and production.

Nanosecond self-pulsing micro-plasma chips enable catalyst-free CO₂-to-CO conversion with ~50% energy efficiency and 30% conversion, surpassing conventional plasma systems while operating at low power.

Twisted MoS₂ bilayers induce strain-driven charge effects that enhance hysteresis and photocurrent behavior, linking stacking disorder to memtransistor functionality and enabling controlled memory performance in 2D devices.

A self-assembling, shape-matched 3D soft interface enables high-density electrophysiology, stimulation, imaging, and neuromodulation in human neural organoids, enabling high-resolution, network-level activity mapping and disease modeling.

This study presents the first island-like 3C-SiC/Si heterojunction self-powered photodetector, achieving high responsivity, detectivity, 65% EQE, and fast response at 637 nm without external bias.

Soft 3D bioelectronic interfaces were fabricated by blending PEDOT:PSS with methacrylated gelatin via two-photon polymerization, yielding conductive, low-impedance, mechanically compliant hydrogels for improved neuronal interfacing.

A comprehensive framework for fabricating, harvesting, and characterizing freestanding micro-nanodevices, enabling minimally invasive, wireless neural interfaces with subcellular resolution and scalable neuromodulation potential.

LesM microfluidic chip captures and mechanophenotypes circulating tumor cells, distinguishing bacteria-infected breast cancer cells via deformation, linking microbial cargo and biomechanics to metastatic risk and antibiotic response.

Patterned wettability contrasts control bubble detachment, revealing contact-line pinning, geometry-dependent volumes, and deviations from classical models, offering insights to improve hydrogen electrolysis and mineral flotation efficiency.

Gold microelectrodes patterned on porous, stretchable PDMS membranes enable impedance sensing under cyclic strain, advancing barrier tissue models and applications in wearables, robotics, and devices.

Circulatronics uses immune cell–electronics hybrids for nonsurgical brain neuromodulation, enabling intravenous delivery, autonomous targeting of inflammation, wireless photovoltaic stimulation, and neural control without invasive surgery.

Scalable fabrication of twin-boundary-free Cu(111) wafers enables ultraflat 6-inch substrates for high-quality wafer-scale graphene with excellent uniformity, low resistance, and high carrier mobility performance metrics.

Scalable batch-fabricated silicon AFM probes integrate ultra-sharp high-aspect-ratio tips and stair-shaped handles, enabling 5 nm resolution, unobstructed laser detection, compatibility, and durable high-fidelity nanoscale imaging.

Demonstrates single-step 3D patterning of negative resists using maskless aligner, enabling complex microstructures for biomedical, MEMS, and microfluidic applications.

Heidelberg Instruments proudly celebrates the 10th anniversary of the MLA 150 Maskless Aligner—a breakthrough that has redefined high-resolution lithography in cleanrooms around the world.

µCodes is a microgrid system enabling precise sample tracking and image alignment across diverse optical and electron microscopy modalities.

Optically driven metasurfaces power on-chip micromachines, enabling lithographically fabricated gear trains and micromechanisms down to tens of micrometers with sub-micrometer precision and scalable integration capabilities.

Room-temperature growth of α-tantalum on silicon using niobium seed layers yields superconducting resonators with state-of-the-art quality factors, enabling low-thermal-budget integration for qubit circuits applications.

CMOS-compatible SOI foundry integration enables scalable silicon NEM switches with low-voltage operation, volatile and nonvolatile modes, paving high-density logic and memory for extreme environments.

Picoeukaryote-based biohybrid microrobots enable active drug delivery in confined environments, demonstrating strong motility, kidney penetration, long-term retention, biosafety, and immune evasion in vivo.

A scalable silicon-mold and polymer-casting platform produces flexible, durable superblack materials with 0.15% reflectance, angle-insensitive Lambertian behavior, and customizable surfaces for advanced optical applications.

Sb alloying in Mn(Bi,Sb)2Te4 tunes Berry curvature, spin chirality, and harmonic Hall responses, inducing topological transitions and reversible anomalous Hall effects for chiral spin-orbitronic devices.

This presentation introduces methods for optimizing various direct-writing lithography systems from Heidelberg Instruments to push the resolution limit for smaller structures in collaboration with IMS Chips Germany.

Thermal flow sensors measure fluid flow by detecting heat dissipation from a heated wire. A novel silicon-based design compensates for fluctuations ensuring accuracy.

Silicon-based microneedles enable interstitial fluid biomarker extraction. Proposed dry etching technique achieves mass production compatibility, enhancing biomedical applications for minimally invasive diagnostics and monitoring.

Microfluidic channels cultivate Phaeobacter inhibens biofilms on diverse polymer surfaces, offering biocontrol potential in aquaculture by mitigating antibiotic risks. Creating diverse surfaces to promote biosynthesis.

Micro-projectiles were created through maskless UV lithography, O₂ plasma treatment, silicon etching, and metal cladding. These conical micro-projectiles have applications in magnetically guided cell transfection.

Spin-acoustic control demonstrated on a 4H silicon carbide-based bulk acoustic resonator allows frequency-tunable probing of resonances, aiding in dynamic strain distribution analysis for microelectromechanical systems.

CMOS-compatible aperture-controlled deposition enabled microscopic all-dielectric structural color pixels, producing vibrant wafer-scale images through interference effects without costly electron-beam lithography.

PMN–PT thin film disks, with single-electrode actuation, showcase self-aligned tangential and wineglass modes for high-frequency bulk acoustic wave (BAW) MEMS gyroscopes.

Innovative MEMS micro-coil probe fabrication overcame brain stimulation challenges, validated in vivo. International collaboration advances micro-magnetic stimulation for applications like artificial vision and hearing.